Please use this identifier to cite or link to this item: http://hdl.handle.net/11455/2822
標題: 可撓性壓電感測器之研究
Development of flexible piezoelectric vibration sensor
作者: 李佳賢
Li, Chia-Hsien
關鍵字: 單頻段;Single-band;可撓性;低頻;壓電感測器;flexible;low-frequency;piezoelectric sensor
出版社: 機械工程學系所
引用: [1] M. Kimura and K. Toshima, "Vibration sensor using optical-fiber cantilever with bulb-lens," Sensors and Actuators A: Physical, vol. 66, pp. 178-183, 1998. [2] M. Q. Feng and D.-H. Kim, "Novel fiber optic accelerometer system using geometric moire fringe," Sensors and Actuators A: Physical, vol. 128, pp. 37-42, 2006. [3] T. Guo, A. Ivanov, C. Chen, and J. Albert, "Temperature-independent tilted fiber grating vibration sensor based on cladding-core recoupling," Optics letters, vol. 33, pp. 1004-1006, 2008. [4] T. Guo, L. Shao, H. Y. Tam, P. A. Krug, and J. Albert, "Tilted fiber grating accelerometer incorporating an abrupt biconical taper for cladding to core recoupling," Optics express, vol. 17, pp. 20651-20660, 2009. [5] J. Bernstein, R. Miller, W. Kelley, and P. Ward, "Low-noise MEMS vibration sensor for geophysical applications," Microelectromechanical Systems, Journal of, vol. 8, pp. 433-438, 1999. [6] J. Chae, H. Kulah, and K. Najafi, "A monolithic three-axis micro-g micromachined silicon capacitive accelerometer," Microelectromechanical Systems, Journal of, vol. 14, pp. 235-242, 2005. [7] A. Vogl, D. T. Wang, P. Storas, T. Bakke, M. M. V. Taklo, A. Thomson, and L. Balgard, "Design, process and characterisation of a high-performance vibration sensor for wireless condition monitoring," Sensors and Actuators A: Physical, vol. 153, pp. 155-161, 2009. [8] A. Partridge, J. K. Reynolds, B. W. Chui, E. M. Chow, A. M. Fitzgerald, L. Zhang, N. I. Maluf, and T. W. Kenny, "A high-performance planar piezoresistive accelerometer," Microelectromechanical Systems, Journal of, vol. 9, pp. 58-66, 2000. [9] T. Kobayashi, H. Okada, T. Masuda, R. Maeda, and T. Itoh, "A Digital Output Accelerometer Using MEMS-based Piezoelectric Accelerometer Connected to Parallel CMOS Circuit," Procedia Engineering, vol. 5, pp. 1071-1074, 2010. [10] T. Yan, B. E. Jones, R. T. Rakowski, M. J. Tudor, S. P. Beeby, and N. M. White, "Design and fabrication of thick-film PZT-metallic triple beam resonators," Sensors and Actuators A: Physical, vol. 115, pp. 401-407, 2004. [11] F. Gerfers, M. Kohlstadt, H. Bar, M. Y. He, Y. Manoli, and L. P. Wang, "Sub-μg Ultra-Low-Noise MEMS Accelerometers Based on CMOS-Compatible Piezoelectric AlN Thin Films," 2007, pp. 1191-1194. [12] 陳志清, 1997, ”壓電薄膜表面聲波元件之製作,” 國立台灣大學 機械工程研究所, 碩士論文 [13] 陳銀郎, 2000,“鋯鈦酸鉛鐵電薄膜之有機金屬化學氣相沉積合成,”國立台灣科技大學, 碩士論文 [14] 量測發展中心, 1999, “電陶瓷應用線性研討會,” 財團法人工業技術研究院 [15] 施敏升, 2002,“壓電致動器與感測器之分析與研究,” 私立中原 大學機械工程學系, 碩士論文 [16] 薛竣鴻, 2009, “低溫沉積二氧化矽和鋯鈦酸鉛複合薄膜於可撓性 基板之研究, ”國立中興大學機械工程研究所,碩士論文 [17] 莊峻佑, 2010, “鋯鈦酸鉛薄膜製程參數對機電性質之影響, ” 國 立中興大學機械工程研究所,碩士論文
摘要: 
本論文將壓電材料沉積於可撓性基板製作出一單頻段低頻壓電感測器,用於檢測低頻振動機械的故障,並利用單頻段感測器不需利用頻譜來判斷而是直觀的觀察輸出電壓的優點來提升感測器實用性並減少系統成本。此感測器工作頻率低於100Hz、且在低頻時擁有高靈敏度並能承受自身長度一半的撓曲。我們先利用有限元素軟體分析不同感測器共振頻率,接著將感測器共振頻率設定在低頻機械的作用頻率上,當機械因故障使得震動頻率有所偏移時會造成感測器靈敏度的變化,進而檢測機械是否故障。
實驗結果中感測器共振頻率為76Hz,且當震動頻率偏移5Hz時,其靈敏度約有50%的降幅,因此能判別出機械作用頻率是否有偏移的現象。在輸出方面,作用頻率100Hz以下擁有超過60mV/g的靈敏度,其高靈敏度可使訊號抓取容易,並且擁有較大的判別性。在撓曲測試方面,經過多次重複性試驗後,其撓曲對於對於靈敏度影響<10%,可知當機械出現爆震時,本感測器擁有較佳的承受力。最後將輸出之交流訊號轉換為直流訊號,如此可利用一般之量測設備進行量測而減少頻譜訊號處理的步驟而達到節省設備成本的優點;另一方面將訊號直觀以直流數值化的方式呈現能更加簡易判斷機械故障與否。

In this study, a single-mode piezoelectric sensor for the detection of low-frequency vibration mechanical failure is developed. To have the single-mode sensor to be operated at low frequency, we deposited the PZT-silica composite films on a PI-copper flexible substrate at 150C by sol-gel technology. The advantage of using low-frequency single-mode sensor for the detection of mechanical failure is that no extra signal process system is required and vibration is able to be estimated by the output voltage directly in order to enhance the practicability and reduce the system cost.
Experimental result showed that developed sensors operated at 76Hz. When the frequency is shifted by 5HZ, the sensitivity plummets by 50%.
Due to the significant change, we can tell whether the vibration frequency of low-frequency machineries is shifted. As for the output, the sensitivity of sensors is large than 60mV/g. The sensors also were able to be used at large deflection test. After repetitions of testing, the change of sensitivity was less than 10%. Thus, when knocking occurs, our sensor has better endurance. The sensor output was able to detect vibration at specific frequency by scaling the signal and the signal process system could be simplified instead of using the spectrum technique.

Keyword:
Single-mode, flexible, low-frequency, piezoelectric sensor
URI: http://hdl.handle.net/11455/2822
其他識別: U0005-2908201223543600
Appears in Collections:機械工程學系所

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