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A study of magnetoelastic film fluxgate-based strain sensor
|關鍵字:||逆磁致伸縮;inverse magnetostrictive;半導體式應變規;通量閘;RLC振盪電路;semiconductor strain gauge;fluxgate;RLC circuit||出版社:||機械工程學系所||引用:|| E. E. Mitchell, R. Demoyer, And J. Vranish, “ A New Metglas Sensor,” IEEE Transactions on Industry Applications , Vol. 26 , NO. 6, May 1986.  Akram Hosain ,and Muhammad H. Rashid, “ Force Transducer Using Amorphous Metglas Ribbon ,” IEEE Transactions On Industry Applications,Vol.26,NO.6,November/December1990 ,pp.1158~116.  Dimitrios Kouzoudis and Dionysios E. Mouzakis, “A 2826MB Metglas ribbon as a strain sensor for remote and dynamic mechanical measurements,” Sensors and Actuators A, Vol.127,No2, p.355, 2006.  Ee Lim Tan, Brandon D Pereles, Ranyuan Shao, Justin Ong and Keat Ghee Ong, “A wireless, passive strain sensor based on the harmonic response of magnetically soft materials ,” Smart Materials and Structures, 13 February 2008.  G. Ausanio , A.C. Barone , C. Hison , V. Iannotti , G. Mannara , L. 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以拉伸試驗量測感測器的靈敏性並與半導體式應變規比較，證實磁性應變計可量測到100 micro strain內的範圍，且靈敏性比半導體式應變規高17.58倍以上，彎曲測試由電壓變化結果證實磁彈薄膜受拉伸與彎曲應力影響導磁率變化相反，且靈敏性相同，偏磁測試中證實以1 Gauss以下且垂直於交流激磁場方向的偏磁具有較高靈敏性的結果，敲擊測試結果證實磁彈薄膜的動態響應良好，可感測到不銹鋼試片受應變所產生約200 Hz的敲擊機械共振頻率，且訊雜比到達123，符合高靈敏性感測器的指標值，最後供應訊號源測試結果以定電流源供應於激磁線圈靈敏性較好，高於定電壓源17.2倍。
Traditional strain gauges divided metallic and semiconductor type, however limited by the wire strain gauge sensitivity inadequate, and semiconductor strain gauge easily influenced by temperature , resulting in measurement reliability, stability and repeatability inaccurate and both need wire contact, so traditional strain regulation can’t be used in measuring the high rigidity specimen and need high sensitivity measurement occasions, according to above problems, this research proposed using highly sensitive planar fluxgate sensor as the framework in order to achieve high sensitivity and non-contact magnetic strain sensor.
In other to achieve the desirable functionality with accuracy, base on magnetoelastic effect, this study used the low-priced and highly-sensitivity Metglas 2714A (Co66Fe4Si15B15) cobalt-based amorphous ribbon as a sensing material, use the planar fluxgate framework with exciting coil and receiving coil combine magnetoelastic film, the exciting coil is used to exciting magnetoelastic film and receiving coil is used to induce the film permeability, however using the RLC oscillation circuit can improve impedance mating for two coil, this framework is used plane coil and the film as a RLC circuit inductance , when the film is change the permeability by the mechanical deformation , the induced voltage is change in the receiver coil and change coil’s inductance, the output signal is amplified by the processing circuit.
Bond the magnetoelastic film on the Aluminum specimen and stainless steel specimen to examining the tensile test, bending test, vibration test and pre-magnetization with a permanent bias test in other to operate in a optimize region of the performance and so on prove magnetic strain sensor have highly sensitivity and dynamic response property and another test is different signal source for exciting coil to compare sensitivity.
The examination result for tensile test to measure the sensitivity of the sensor and compare with semiconductor strain gauge, confirmed magnetoelastic film sensors can measure strain to 100 με, Sensitivity is higher 17.58 times more. The bending tests confirmed film that endure tensile and bending stresses have opposite permeability trend, and the similar sensitivity. The permanent bias test is prove when one Gauss or less bias field are perpendicular to the excitation field axis, the results will with high sensitivity. The vibration test confirms good dynamic response can be sensed in a stainless steel test piece of about 200 Hz resonance frequency, and the signal to noise ratio is 123, corresponding the highly sensitivity sensor and the signal source test result is prove that current source sensitivity is higher than voltage source about 17.2 times.
Magnetic strain sensor sensitivity is higher than the semiconductor strain gauge and can remote measurements, moreover magnetic strain sensor is simplified manufacturing process and low cost, so this sensor is suitable for practical applications. In the future planar coil needs reduce area through the semiconductor process technology and shielded the magnetoelastic film to against noise, and then increase sensitivity through heat treatment, the research goals is develop non-contact magnetic strain sensor.
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