Please use this identifier to cite or link to this item: http://hdl.handle.net/11455/2839
標題: 多軸微定位平台控制探討
Study on the Control of A Multi-Axis Micro-Positioning Stage
作者: 于孝勇
Yu, Hsiao-Yung
關鍵字: 定位平台;positioning stage;PID;壓電致動器;撓性結構;PID;piezoelectric actuators;flexural structures
出版社: 機械工程學系所
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摘要: 
本研究主要是針對一個三軸六自由度的精密定位平台,利用 PID 控制法則進行控制的探討。所使用的驅動源為三Pst150/5x5/20壓電致動器(PZT)用於 X、Y 及 θ軸的驅動,另三根選用PI P-840.10壓電致動器用於Z 、ψ與 φ軸的驅動。而平台結構則是由四個對稱的L型撓性鉸鏈組成,在作動時,可減少耦合現象的產生。
在訊號處理方面,採用Mercury 3500光學尺量測系統來截取平台的位移訊號,再採用電腦架構搭配NI PCIe-6323型的AD/DA 傳輸介面卡進行訊號的傳遞與訊號處理。在控制法則部分,採用Ziegler and Nichols臨界靈敏度調整法,並透過MATLAB的NCD Toolbox模組進行模擬,計算出各軸之PID參數,而後應用於實驗。
經由實驗結果,在步階定位實驗中,X軸、Y軸、Z軸、θ軸、ψ與φ軸的誤差最大不超過0.0752 μm與0.825 μrad。而在斜坡追蹤實驗中,X軸、Y軸、Z軸、θ軸、ψ與φ軸的誤差最大不超過0.4769 μm與3.3209 μrad。最後,在循圓測試實驗中,X軸與Y軸的誤差最大不超過0.2388 μm。
URI: http://hdl.handle.net/11455/2839
其他識別: U0005-0608201316562100
Appears in Collections:機械工程學系所

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