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標題: 微定位平台之性能模擬與分析
Simulation and Analysis Performance of a Micro-Positioning Stage
作者: 林駿逸
Lin, Chun-Yi
關鍵字: 微定位平台;micro-precision positioning stage;一體機構;壓電致動器;撓性結構;flexural structure;monolithic mechanism;piezoelectric actuator
出版社: 機械工程學系所
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本論文的研究步驟主要可分為四個階段,(1)定位平台基本原理探討、(2)定位平台的模型建立、(3)定位平台的有限元素模擬分析、(4)定位平台的實體驗證。針對定位平台的撓性結構進行分析其對平台所造成的自由度、靜態與動態特性,最後將理論分析與ANSYS有限元素分析、實驗的結果互相比較誤差,藉以驗證理論分析的正確性,並經由實體實驗量測出平台尺寸為150mm×150mm×45mm,在X方向之最大位移為36.584 μm、Y方向之最大位移為14.918 μm、θ之最大旋轉量為213.26 μrad;在Z方向之最大位移為7.472 μm、ψ之最大旋轉量為106.38 μrad、φ之最大旋轉量為122.24 μrad。最小步階實驗之X方向為0.119 μm、Y方向為0.038 μm、θ方向為1.287 μrad;在Z方向為0.024 μm、ψ方向為0.502 μrad、φ方向為0.379 μrad。

The purpose of this study is to investigate the theory, stimulation, and the reconstruction experiment of micro-positioning stage. Explore displacement and coupling of micro-precision positioning stage as 6 degree-of-freedom. The micro-positioning stage is a monolithic mechanism and use flexure hinge and piezoelectric actuator.
The procedures of this research are divided into the following four steps: (1) fundamental theory study; (2) mathematical model analysis; (3) finite element analysis; and (4) experimental verification. A conceptual design for the positioning stage is conducted according to functional requirements verification in the first beginning. L-shaped flexure hinges are then designed. Mathematical model of this stage is developed, and followed by finite element analysis. Finally, experiments are conducted to verify the design. The actual dimension of the positioning stage is 150 mm × 150 mm × 45 mm. From the experiment results, it shows that the stage can achieve a maximum displacement of 36.584 μm in X axis, 14.918 μm in Y axis and 7.472 μm in Z axis. The stage can also achieve a maximum rotation of 213.26 μrad around Z axis, 106.38 μrad around X axis and 122.24 μrad around Y axis. The minimum step of 0.119 μm in X axis, 0.038 μm in Y axis, 1.287 μrad around Z axis, 0.024 μm in Z axis, 0.502 μrad around X axis and 0.379 μrad around Y axis.
其他識別: U0005-2208201212571000
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