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Titanium dioxide humidity microsensors integrated with circuit
|關鍵字:||CMOS-MEMS;CMOS-MEMS;二氧化鈦;酸處理;濕度感測器;Titanium dioxide;Acid treatment;Humidity sensor||出版社:||機械工程學系所||引用:|| A. V. Arundel, E. M. Sterling, J. H. Biggin and T. D. Sterling, “Indirect health effects of relative humidity in indoor environments,” Environ Health Perspect, Vol. 65, pp. 351-361, 1986.  E. Traversa, “Ceramic sensors for humidity detection: the state-of-the-art and future developments,” Sensors and Actuators B: Chemical, Vol. 23, pp.135-156, 1995.  許桂樹，陳克群和李怡銘，感測器原理與應用，全華圖書股份有限公司，2007。  A. Schroth, K. Sager, G. Gerlach and A. Haberli, “A resonant polyimide-based humidity sensor,” Sensors and Actuators B: Chemical, Vol. 34, pp. 301-304, 1996.  E. I. Radeva, I. N. Martev, D. A. Dechev, N. Ivanov, V. N. Tsaneva and Z. H. Barber, “Sensitivity to humidity of TiO2 thin films obtained by reactive magnetron sputtering,” Surface & Coatings Technology, Vol. 201, pp. 2226-2229, 2006.  Y. Y. Qiu, C. A. Leme, L. R. Alcacer and J. E. 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本研究利用微機電系統(CMOS-MEMS)技術製作整合電路之微濕度感測器，利用溶膠-凝膠法調製奈米顆粒之二氧化鈦，並透過酸或鹼進行表面處理提升二氧化鈦對濕度之靈敏度，不僅製備方法容易，且成本較低，將製備完成之感測薄膜披覆於整合型晶片之梳狀電極中，以完成整合型微濕度感測器的目標。當二氧化鈦吸附環境中之水分子後，使感測薄膜內載子濃度上升，造成其電阻隨著導電率的提升而下降，並整合感測電路將此電阻變化轉換為輸出電壓，藉此量測環境中相對濕度，微濕度感測器之感測區總面積為950 × 700 μm2，於室溫下量測相對濕度由30 %RH至90 %RH時，薄膜電阻由236.3 kΩ下降至68 kΩ，總變化量為168.3 kΩ；當相對濕度由55 %RH至75 %RH時，反應與回復時間分別為 30秒、52秒；整合感測電路時，輸出電壓由2.29 V下降至1.90 V，總變化量為390 mV，感測靈敏度約為6.5 mV/%RH；結果顯示經過酸處理之二氧化鈦可提升對濕度的靈敏度約20.6 %。
This study presents the fabrication of a micro humidity sensor integrated with a sensing circuit using the complementary metal oxide semiconductor (CMOS) process. Nanoparticles titanium dioxide prepared by the sol-gel method is used as the sensing material, and titanium dioxide treated by acid solution improvs the sensitivity for the humidity. The advantages of the humidity sensor are easy fabrication, low cost and operation at room temperature. The titanium dioxide is coated on the comb-like electrodes of sensing region, integrated micro-humidity sensor. When the titanium dioxide exposes to water molecules in the environment, the film absorbs water molecules leading to change the concentration of the irons, therefore the resistance decreased with increasing conductivity. The sensing circuit is used to convert the resistance of the humidity sensor into the output voltage.
The experimental results showed that the sensing resistor of the sensor increased from 236.3 kΩ to 68 kΩ in the humidity range of 30-90 %RH at 25 ℃, and the output voltage varied from 2.29 V to 1.90 V as the relative humidity changed from 30 %RH to 90 %RH at 25 ℃. The sensitivity of the humidity sensor was about 6.5 mV/%RH. Experiments show that the titanium dioxide with acid treatment can enhance the humidity sensitivity of about 20.6 %.
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