Please use this identifier to cite or link to this item: http://hdl.handle.net/11455/2968
標題: Organic/Inorganic Hybrid Polymer Solar Cells By using Si Nanowires
應用矽奈米柱製備有機/無機複合高分子太陽能電池
作者: 謝暐祥
Hsieh, Wei-Hsiang
關鍵字: 矽奈米柱;Hybrid Solar Cells;有機;無機;高分子;太陽能電池;Si Nanowires;Polymer
出版社: 光電工程研究所
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摘要: 
在這篇論文中,我們探討利用塊狀共聚物薄膜PS-b-PMMA形成整齊奈米孔洞的方法以及利用奈米孔洞於非晶矽玻璃基板上作奈米微影,並利用感應式偶合電漿離子乾蝕刻製作出非晶矽奈米柱的結構,最後將非晶矽奈米柱搭配有機半導體材料P3HT/PCBM吸收層製作非晶矽奈米柱有機太陽能電池。
本研究探討在適當的加熱時間、溫度、薄膜厚度、濃度及表面處理的條件下我們可以得到最佳化的PS奈米孔洞陣列。將PS奈米孔洞陣列當蝕刻遮罩應用於a-Si薄膜上,再探討在適當的上下電極射頻功率大小、蝕刻時反應腔室壓力、蝕刻氣體流量多寡、蝕刻時間、蝕刻輔助氣體氧氣流量多寡的條件下利用反應性離子電漿乾蝕刻之方法作圖案轉移後得到a-Si奈米柱的結構。
接著,探討用適當的加熱時間、溫度、薄膜成長速度、材料濃度及乾燥時間的條件下沈積共軛高分子P3HT/PCBM吸收層於a-Si奈米柱結構上,進而做出矽奈米柱複合太陽電池,最後,利用紫外光─可見光光譜分析和分光轉換效率量測系統(IPCE)去分析材料和元件的光吸收特性,接著利用AM1.5校正太陽光模擬器去分析其太陽電池量得效率為0.53%。

In this thesis, we discuss the method of forming neat to nano-hole by using block copolymer lithograph to apply on a-Si Glass substrate,and then fabricate a-Si nano-rod structure by using Inductive Couple Plasma Etching System.Last.To collocate organic semiconductor material P3HT/PCBM on a-Si nano-rod structure to fabricate the Orgnaic/Inorganic Hybrid Polymer Solar Cells.
My experiment result show that:in proper the heating time,heating temperature, film thickness, concentration and surface treatment, we can get the optimization of the PS nano-hole array. Using the optimization of the PS nano-hole array on the a-Si substrate , and then discuss in proper the RF Power、etching pressure、etching gas flow、etching time、assisting etching by oxygen gas flow, utilize the method of reactivity ion Plasma etching that patterning to get the a-Si nano-rod structure.
Then,discuss in proper heating time,heating temperature, grow film speed , concentration and dry time coating P3HT/PCBM active layer on a-Si nano-rod structure to fabricate Orgnaic/Inorganic Hybrid Polymer Solar Cells.Last,using UV-visible and IPCE to analyze the property of absorptive absorption of material and device,and then to analyze the solar cell device that get the efficiency is 0.53% by the AM1.5 solar cell PV measurement.
URI: http://hdl.handle.net/11455/2968
其他識別: U0005-2906200916404800
Appears in Collections:光電工程研究所

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