Please use this identifier to cite or link to this item:
標題: Monitoring and dynamic control of distance and tilt angle measurements in micro-alignment instrument using an imaging approach
作者: Jeng, C.C.
Wu, C.H.
Li, C.Z.
Chen, J.H.
關鍵字: c squid microscope;interference
Project: Optics Express
期刊/報告no:: Optics Express, Volume 17, Issue 17, Page(s) 14722-14728.
An accurate and simple optical triangulation method is proposed for determining the distance and the tilt angle between the window and the SQUID sensor in a scanning SQUID microscope (SSM) system. The surface of window near the sensor plane is roughened with Alumina powder so that the incident and reflected traces of the laser beam passing the window surface become visible and can be measured precisely with a normal optical microscope. Using the proposed approach, the distance between the sensor and the sample can be reproducibly adjusted to 30 mu m or less. This method can also be applied to photolithography apparatus to detect the relative positions of the mask and the wafer. (C) 2009 Optical Society of America
ISSN: 1094-4087
Appears in Collections:奈米科學研究所

Show full item record

Google ScholarTM


Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.