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標題: 化學方法製備鎳奈米顆粒及無鈀中性無電鍍銅配方於軟性聚亞醯胺基板之金屬化研究
Studies of Chemical Formation and Characterization of Ni Nanoparticles and Palladium-Free Neutral Electroless Copper Plating Formula Used for Metallization of Flexible Polyimide Film
作者: 黃上恩
Huang, Shang-En
關鍵字: Polyimide(PI);聚亞醯胺;Electroless Copper Deposition;Metallization;Nickel Nanoparticle;無電鍍銅;金屬化;鎳奈米顆粒
出版社: 化學工程學系所
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利用全濕製程方式,將聚亞醯胺基板進行直接金屬化,使鎳奈米顆粒(NNPs)直接沉積於聚亞醯胺表面,再以NNPs為晶種層催化後續無電鍍液使銅層增厚,由於聚亞醯胺的不耐鹼,吾人選用中性的無電鍍液減少在無電鍍時對聚亞醯胺基板的傷害。由於在還原步驟中,還原劑二甲基胺硼烷對鎳金屬的還原力不佳,使得NNPs在PI表層並沒有很好的覆蓋率和催化活性,且有部分NNPs會包覆在內層PI中而沒有作用,吾人藉由添加無機鹽硫酸銅、硝酸銀、氯化鈀來提升二甲基胺硼皖的氧化反應,快速丟出電子還原鎳離子,改善NNPs的表面形態和催化活性,使得後續無電鍍的沉積速率因而提升,原本內層PI殘留的NNPs也減少許多,後續在量測無電鍍銅的導電性與附著性皆良好,在此稱加入無機鹽於還原劑中所得的NNPs為PE-NNPs (Performance-Enhanced NNPs)。吾人藉由各種儀器分析各添加劑所扮演的角色,例如:場發射掃描式電子顯微鏡分析NNPs的表面形態,藉由穿透式電子顯微鏡分析樣品的橫截面,藉由電子能譜儀分析元素分布,並藉由恆電位儀分析添加劑的作用。

Currently, electronic products tend toward high density and further precision. Processes become micro-scale and nano-scale, pursuing lightness, thinness, miniaturization and multi-function products. The need of flexible printed circuit board (FPC) and rigid-flex PCB are growing by a large margin. FPC is thin and flexible dielectric material used for dynamic and rollable products such as camera, cell phone, and notebook. For the fabrication of FPCs, polyimides(PIs) is elect substrate because of many outstanding properties, such as high thermal stability, good mechanical strength, and low dielectric constants. There are some problems of FPC preparation, so this work emphasizes PI surface metallization for preparing circuits, good adhesion between copper foil and PIs, to reduce the costs of procedure and to improve traditional process.
This work used an overall wet process to carry out direct superficial metallization, causing nickel nanoparticles (NNPs) to deposit on PI surface. NNPs serve as seed layer to catalyze following copper electroplating, thickening and flattening the copper layer formed on PI. In addition, traditional electroless plating solution is alkaline and not unsuitable for PI, we replace by neutral electroless plating solution to reduce damage. Owing to weak reductivity of dimethylamine borane(DMAB) for NNPs formation, NNPs on PI surface have poor coverage and poor catalytic activity. Furthermore, there are some NNPs formed in interior PI which is useless for electroless plating. To solve those problems, we add some additive like CuSO4, PdCl2, AgNO3 to improve oxidation rate of DMAB, causing DMAB to release electrons rapidly for Ni ions reduction. Performance-enhanced NNPs (PE-NNPs) have uniform distribution and less NNPs exist in interior PI. Hence, the rate of electroless deposition is enhanced as well due to the PE-NNPs. By the way, the adhesion between copper and PI and electric conductivity of copper deposition are still good. Results show that these chemical additives possess considerable influence on the formation of metal nanoparticles on chemically modified PI film. The samples are characterized by FE-SEM, TEM, ESCA and potentiostat analyses in order to understand their morphology, cross-section distribution, element composition and reaction of additive.
其他識別: U0005-1907201020065100
Appears in Collections:化學工程學系所

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