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標題: Comparisons of Transparency AZO Films Using Sol-Gel and RF Sputtering Methods
作者: Shih, N.F.
Chen, S.T.
Chang, C.C.
Kung, C.Y.
Chen, B.J.
Yao, P.C.
關鍵字: AZO;Sol-gel;Transparent;Conducting film;thin-films;band-gap
Project: Journal of Superconductivity and Novel Magnetism
期刊/報告no:: Journal of Superconductivity and Novel Magnetism, Volume 23, Issue 6, Page(s) 1189-1192.
In this research, we report the result of two different methods of making AZO films. In the first method, the AZO film was deposited on silicon wafer and glass substrate using a magnetic controlled RF sputtering system, with rf power (150 W) at two working pressures, 5 mtorr, and 10 mtorr, respectively. The deposition temperatures were 25, 100, 150, 200, and 300 A degrees C, respectively. In the second method, the AZO film was made by sol-gel coating using (CH(3)COO)(2) Zna <...2H(2)O mixed with AlCl(3)a <...6H(2)O and melting in HOC(2)H(4)NH(2) and CH(3)OC(2)H(5)OH solvent and annealing at N(2) and/or 6% H(2)/Ar for one hour. The transparencies of the films are all larger than 80%, and the resistivities may reach 10(-3) Omega cm.
ISSN: 1557-1939
DOI: 10.1007/s10948-010-0659-2
Appears in Collections:光電工程研究所

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