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標題: 電容式射頻微機電開關之設計與製作
Design and Fabrication of Capacitive RF MEMS Switch
作者: 張松濤
chang, sung tao
關鍵字: 射頻微機電;RF MEMS;微開關;switch
出版社: 精密工程研究所

In this thesis, we present a improvement capacitive RF MEMS shunt switch which presented by Timans in 2001. After improving the design, we analyze and simulate of electricity and mechanical characteristic to this RF MEMS switch. In analysis and simulation, we use ANSYS to study displacement and nature resonance frequency, and HFSS to predict the insertion loss and isolation of the RF MEMS switch. The actuation voltage of the switch is 14V. The best rf performance shows insertion loss of less than 0.9dB for all frequencies up to 40GHz and isolation of greater than 20dB from 6.7GHz to 26.5GHz. In experiment, we successful use the MEMS technology to fabricate the RF MEMS switch reducing the processes from five masks to four masks.
Appears in Collections:精密工程研究所

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