Please use this identifier to cite or link to this item: http://hdl.handle.net/11455/4016
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dc.contributor.advisor楊錫杭zh_TW
dc.contributor.author黃俊瑋zh_TW
dc.contributor.authorHuang, Jiun-Weien_US
dc.date2004zh_TW
dc.date.accessioned2014-06-06T06:26:50Z-
dc.date.available2014-06-06T06:26:50Z-
dc.identifier.urihttp://hdl.handle.net/11455/4016-
dc.description.abstract本研究為研發一新式製作微透鏡製程。其製作步驟為先以厚膜光阻SU-8製出微六角陣列細管,再將UV固化膠填入微六角陣列管柱中,接著搭配旋出多餘的膠與UV燈源照射固化,將微凹形透鏡模具製成,續以PDMS翻模成凸透鏡。實驗改變將膠旋出之旋轉參數(5500rpm、5000rpm、4500rpm)、微六角細管開口(100μm、75μm)與陣列微管柱間隔之距離(5μm、10μm、15μm、20μm);研究中發現微細管柱內膠之多寡將決定凹形微透鏡之深度與翻模後微凸透鏡高度,而微六角管開口越大、旋膠轉速越快與陣列細管間隔距離越小,可將UV膠排出較多,將可得到較深之凹形微透鏡,即有翻模後較高微透鏡高度;而實驗中已做到最大透鏡高度達到10.82μm。zh_TW
dc.description.abstractA new method for fabricating microlens array is proposed in this research. Three steps in this fabrication technique are included. First, using the photoresist SU-8 to fabricate hexagonal microchannel array is required. Second, UV curable glue is to fill up hexagonal microchannel array. Third, the surplus glue can be spun by spinner and exposed by using UV lamp to harden UV glue. The micro concave lens molds are finished and can be molded into convex lens by PDMS. Different experimental parameters including spin speed(5500rpm、5000rpm、4500rpm), hexagonal microchannel size(100μm、75μm) and various pitches of hexagonal microchannel(5μm、10μm、15μm、20μm) were studied. In this research, the amount of UV glue can determine the micro concave lens mold profiles and convex lens sag heights. A large hexagonal microchannel size and a higher spin speed can generate a higher sag of concave lens mold. Then, a shorter pitch of hexagonal microchannel results in a deep concave profile.zh_TW
dc.description.tableofcontents目 錄 第一章 緒論 1 1.1研究背景 1 1.2 研究動機 2 1.3研究目標 3 1.4研究方法與步驟 5 1.5本文大綱 6 第二章 文獻回顧 8 2.1折射式微透鏡製程 8 2.1.1熱熔法 8 2.1.2熱壓回熔法 9 2.1.3微液滴法(droplet)[7] 10 2.1.4灰階光罩法[8] 11 2.1.5 LIGA製造法 12 2.2紫外光成型膠製程特性 15 2.3LIGA與類LIGA技術 18 2.4紫外光成型膠製作折射式微透鏡技術 21 第三章 新式紫外光膠微透鏡模仁製程規劃 25 3.1 製作前言 25 3.2 基本理論 25 3.3製作流程 28 3.4厚膜光阻SU-8製作微細陣列管柱製程 31 3.4.1厚膜光阻SU-8簡介 31 3.4.2光罩設計 32 3.4.3 SU-8黃光微影製程 36 3.5紫外光膠微透鏡模仁成型技術 42 第四章 紫外光膠微透鏡模仁量測與翻模 45 4.1量測儀器設備說明 45 4.1.1 探針式3-D表面輪廓儀 45 4.1.2掃描式電子顯微鏡(SEM) 48 4.2 UV固化膠表面粗造度量測 48 4.3 凹形微透鏡陣列模仁觀察與量測 50 4.3.1 量測說明 50 4.3.2 旋轉參數5500rpm,管之對角線寬為100μm 51 4.3.3 旋轉參數5500rpm,管之對角線寬為75μm 56 4.3.4 旋轉參數5000rpm,管之對角線寬為100μm 60 4.3.5旋轉參數5000rpm,管之對角線寬為75μm 64 4.3.6旋轉參數4500rpm與其他參數關係的透鏡高度輪廓趨勢圖 68 4.4 PDMS翻模 72 4.4.1 PDMS簡介 72 4.4.2 翻模流程 72 4.4.3 翻模結果 73 4.5 結果與討論 76 4.6 透鏡幾何形狀探討 79 4.7 實驗之誤差探討 82 第五章 結論與展望 83 5.1 結論 83 5.2 未來展望 84 參考文獻 85zh_TW
dc.language.isoen_USzh_TW
dc.publisher精密工程研究所zh_TW
dc.subjectLIGA-likeen_US
dc.subject類深刻模造技術zh_TW
dc.subjectMicro-lens Arrayen_US
dc.subjectUV CURING GLUEen_US
dc.subject微透鏡陣列zh_TW
dc.subject紫外光固化膠zh_TW
dc.title以類LIGA技術與紫外光固化膠製作微透鏡陣列之新式製程設計探討zh_TW
dc.titleA NEW METHOD USING LIGA-LIKE TECHNOLOGY AND UV CURING GLUE TO FABRICATE MICROLENS ARRAYen_US
dc.typeThesis and Dissertationzh_TW
item.fulltextno fulltext-
item.languageiso639-1en_US-
item.openairetypeThesis and Dissertation-
item.cerifentitytypePublications-
item.openairecristypehttp://purl.org/coar/resource_type/c_18cf-
item.grantfulltextnone-
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