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標題: 振膜結構對微型帶狀麥克風影響之研究
A study of diaphragm structure on the fabrication of miniature ribbon microphones
作者: 梁瑜欽
Liang, Yu-Chin
關鍵字: miniature ribbon microphone;帶狀式麥克風;MEMS;frequency response;微機電系統;頻率響應
出版社: 精密工程學系所
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本論文主要利用半導體製程技術結合微機電技術來製作高感度的微型帶狀式麥克風。在帶狀式麥克風感應線路設計上,為了增加感應線路切割磁場後所產生的電訊號,設計出以雙層感應線路,進而提高微型帶狀式麥克風輸出感度,並提出以不同形狀振膜開孔之方式,有效釋放振膜應力,進而提升振膜的振動速度與機械感度,並獲得良好的麥克風靈敏度。SU-8 1040光阻材料作為帶狀式麥克風振膜,易於運用黃光顯影製程技術在振膜結構上設計開孔圖形。
SU-8 1040光阻材料另一個優點是採低溫製程減少振膜與基板因熱膨脹係數不同所造成異質應力的產生。在本論文中,雙層感應線路設計下其感應線路尺寸為17 mm×3 mm×0.003 mm並將振膜兩邊開長方形開孔,振動速度為4.85 um/s。在1 kHz取樣頻率下,搭配變壓器後,量測其頻率響應值為-42.6 dBV/Pa,相當於輸出感度為7.41 mV/Pa。

In this thesis, we have presented a high sensitive miniature ribbon microphone fabricated with a combination of semiconductor manufacturing and micro-electro-mechanical system techniques. For the circuit design within ribbon microphone, the dual induction circuit was introduced in order to amplify the signal from induction coil cutting magnetic field. Furthermore, the vibration velocity and sensitivity of diaphragm were significantly improved by altering its shape as a consequence of releasing diaphragm strain. The miniature ribbon microphone thus possesses of a higher sensitivity.
SU-8 1040 was used as a main material of the diaphragm in miniature ribbon microphone since it was more compliant to the lithophotography that we implemented in this study. Another advantage of using SU-8 1040 is a lower process temperature, which reduced the extrinsic stress induced by the difference of thermal expansion coefficient between diaphragm and substare. The dimension of dual induction circuit was 17 mm×3 mm×0.003 mm for rectangular shape. With this design,the vibration rate reached 4.85 um/s. The frequency response of miniature ribbon microphone was -42.6 dBV/Pa (@1k Hz), corresponding to a sensitivity of 7.41 mV/Pa.
其他識別: U0005-3006201112345900
Appears in Collections:精密工程研究所

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