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標題: 高反射膜對藍光發光二極體之光特性影響
Effects of High Reflective Thin Film on the Luminescence of Blue Light Emitting Diodes
作者: 羅玉雲
Lo, Yu-Yin
關鍵字: GaN;氮化鎵;light-emitting diodereflection film;reflection film;發光二極體;反射膜
出版社: 精密工程學系所
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目前氮化鎵磊晶薄膜可以選擇在氮化鎵、藍寶石或碳化矽等基板上成長,使用氮化鎵或碳化矽作為基板,因成本太高或基板備製技術尚未突破,所以目前產業界大部分皆以藍寶石作為磊晶基板。而藍寶石基板透明度非常好,所以製作完成的發光二極體元件,有一部份的光源會從藍寶石基板出光,本論文將研究蒸鍍三種不同高反射膜於藍寶石基板背面,探討這些反射膜對氮化鎵發光二極體之光特性影響。三種不同反射膜分別為(TiO2/SiO2)9多層膜、(TiO2/SiO2)2/ Al多層膜及鋁(Al)膜。
高反射膜蒸鍍於氮化鎵發光二極體基板背面完成後,切割及封裝成燈泡,以積分球在電流為20 mA量測光輸出功率。蒸鍍反射鏡面與未蒸鍍反射鏡面之發光二極體光輸出功率比較,其蒸鍍(TiO2/SiO2)9多層膜,光輸出功率增加14%,蒸鍍 (TiO2/SiO2)2/ Al多層膜,光輸出功率增加18%,蒸鍍Al膜,光輸出功率增加11%。所以最佳反射鏡面為(TiO2/SiO2)2/ Al多層膜。
一般,光電廠氮化鎵發光二極體產品皆以基板背鍍Al膜,增加亮度。本論文貢獻以 (TiO2/SiO2)2/ Al多層膜的反射鏡面比Al反射鏡面在氮化鎵發光二極體光輸出功率增加約7%。

III-V nitride semiconductor has been successfully developed for the blue and green light. The most commonly used substrate for the crystal growth is sapphire, which is transparent for the visible light. It is worthy to note that the light emitting toward to the transparent substrate may be reflected by coating a mirror layer on the backside of the substrate, resulting in higher external quantum efficiency. In this dissertation, a hybrid distributed Bragg reflector (DBR) was studied for the blue LED applications.
Several configurations of mirror layer were designed by optical simulation. The result showed that the better configuration may be (TiO2/SiO2)9 and (TiO2/SiO2)2/Al. These films were fabricated by an electron beam evaporation system. The measurement of light output revealed that the mirror layer of (TiO2/SiO2)2/Al had the increase of 18% light output compared with that of the conventional LED structure. The measured data demonstrated a good consistency with the simulation results.
其他識別: U0005-2308200621242500
Appears in Collections:精密工程研究所

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