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標題: 以電熱式致動器驅動之撓性雙穩態機構的設計與分析
Design and Analysis of a Compliant Bistable Mechanism Actuated by an Electro-thermal Actuator
作者: 邱俊達
Qiu, Jun-Da
關鍵字: MEMS;微機電系統;Compliant bistable mechanism;Electro-thermal actuator;撓性雙穩態機構;電熱式致動器
出版社: 精密工程學系所
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在分析模擬方面,使用國家高速網路與計算中心(NCHC)所提供之ABAQUS 6.4有限元素分析模擬軟體來進行模擬,分析模擬電熱式致動器的穩態溫度場及其結構之變形,並觀察撓性雙穩態機構之位移量以及其反作用力大小的關係。最後,我們提出ㄧ個此撓性雙穩態機構及電熱式致動器的製程。

關鍵字: 微機電系統、撓性雙穩態機構、電熱式致動器

A compliant bistable mechanism is designed in this research. It is actuated by an electro-thermal actuator. The main characteristics of the actuator, such as the amount of displacement, the direction of movement, actuating voltage, and temperature distribution etc., are studied with consideration of the effects of surface thermal conduction, thermal convection and heat radiation. With voltage applied to the electro-thermal actuator, the amount of displacement and the variation of the reaction force of the compliant bistable mechanism is studied.
A commercial finite element analysis software, ABAQUS 6.4, is used for the simulation. We simulate the stable thermal field of the electro-thermal actuator and the deformation of its structure, and the amount of displacement and the variation of the reaction force of the compliant bistable mechanism. A fabrication process of the compliant bistable mechanism and the electro-thermal actuator is proposed.

Keywords: MEMS , Compliant bistable mechanism , Electro-thermal actuator
其他識別: U0005-1608200716525000
Appears in Collections:精密工程研究所

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