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標題: 壓電驅動膜片可變焦液態透鏡之研究
Research of variable focus lens with liquid filled using piezoelectric driving membrane
作者: 張朝智
Chang, Chao-Chih
關鍵字: Variable focus lens;可變焦透鏡;PDMS;Piezoelectric;Micro molding;PDMS;壓電片;微模造技術
出版社: 精密工程學系所
引用: 1.行政院國家科學委員會,微機電系統技術與應用,民國92年7月。 2.Choi, Y., Park, J. H., Kim, J. H. and Lee ,S. D., “Fabrication of a focal length variable microlens array based on a nematic liquid crystal,” Optical Materials, 21, pp. 643-646, 2002. 3.Ren, H., Fan, Y. H., Lin, Y. H. and Wu, S. T., “Electronically controlled liquid crystal yields tunable-focal-length lenses,” SPIE’s oemagazine, 4(9), pp. 25-27, 2004. 4.Ren, H., Fan, Y. H. and Wu, S. T., “Polymer network liquid crystals for tunable microlens arrays,” Journal of Physics D: Applied Physics, 37, pp.400-403, 2004. 5.Ren, H., Fan, Y. H., Gauza, S. and Wu, S. T., “Tunable microlens arrays using polymer network liquid crystal,” Optics Communications, 230(4-6), pp. 267-271, 2004. 6.Ren, H. Fan, Y. H., Lin, Y. H. and Wu, S. T., “Tunable-focus microlens arrays using nanosized polymer-dispersed liquid crystal droplets,” Optics Communications, 247(1-3), pp. 101-106, 2005. 7.Fan, Y. H., Ren, H., Liang, X. and Wu, S. T., “Tunable-focus liquid crystal microlens arrays for display applications,” IEEE, 1, pp. 8-9, 2004. 8.Buckley, L., Sands, R., Scribner, D. and Zuccarello, G., “Bio-inspired Optics Draw On Natural Optical Systems to Provide Enhanced Performance,” SPIE’s oemagazine, 4(9), pp. 24, 2004. 9.Kuiper, S. and Hendriks, B. H. W., “Variable-focus liquid lens for miniature cameras,” Applied Physics Letters, 85(7), pp. 1128-1130, 2004. 10.Agarwal, M., Gunasekaran, R. A., Coane, P. and Varahramyan, K., “Polymer-based variable focal length microlens system,” Journal of Micromechanics and Microengineering, 14, pp. 1665-1673, 2004. 11.Chen, J., Wang, W., Fang, J.and Varahramyan, K., “Variable-focusing microlens with microfluidic chip,” Journal of Micromechanics and Microengineering, 14, pp. 675-680, 2004. 12.Jeong, K. H., Liu, G. L., Chronis, N. and Lee, L. P., “Tunable microdoublet lens array,” Optics Express, 12(11), pp. 2494-2500, 2004. 13.Chronis, N., Liu, G. L., Jeong, K. H. and Lee, L. P., “Tunable liquid-filled microlens array integrated with microfluidic network,” Optics Express, 11(19), pp. 2370-2378, 2003. 14.Wang, Weisong. Fang, Ji. and Varahramyan, Kody., “Compact variable-focusing microlens with integrated thermal actuator and sensor,” IEEE Photonics Technology Letters, Vol. 17, No. 12, 2005. 15.Hecht, E., Optics, Addison Wesley, CA: University Adelphi, pp.262- 268, 2002. 16.孫慶成,光電概論,全華科技圖書股份有限公司,2004。 17.耿繼業,幾何光學,全華科技圖書股份有限公司,2006。 18.Zemax快速學習手冊,訊技科技股份有限公司。 19.鄭德駿,無閥式壓電微幫浦製程之探討,國立雲林科技大學碩士論文,2003。 20.張晉祥,壓電驅動式微幫浦製作與分析,國立清華大學碩士論文,2005。 21.丁群修,可變焦液體透鏡之製程研發,國立中興大學碩士論文,2005。 22.楊中堯,液體注入式微型可變焦透鏡模組研製,國立中興大學碩士論文,2006。
本論文在於敘述一簡易製作膜片可變焦液態透鏡的方法,包含了變焦液態透鏡主體、流道及壓電片,以便應用於數位影像系統中。實驗主要步驟為利用黃光微影製程製作出光阻結構,接著於結構上濺鍍ㄧ層金並以PDMS材料作翻模,而翻模後的結構就形成了流道及儲存液體之腔體,接著在一玻璃平板上塗佈液態PDMS,將翻模好的結構主體黏貼於玻璃平板上,使用烤箱於100 ℃下做接合。最後利用壓電致動片來驅動腔體薄膜,經由腔體內的壓力變化來改變PDMS膜片的變化程度,以達到變焦的效果。實驗以直徑3 mm之透鏡來做探討,其所能變焦之範圍大約在33.51 mm至11.14 mm之間(驅動電壓:30V ~ 210V),而本研究重點在於與以往利用外接之驅動方式不同,不僅減省空間,也方便於未來整合於光學鏡頭模組上,且只需接合一次,可有效減少不必要之接合縫隙所造成的液體外漏,也不需要氧電漿做接合或濕蝕刻製程,能有效降低成本,以達到量產所需。

This thesis is to describe a simple method for fabricating a variable focus lens with liquid filled using piezoelectric driving membrane including a flexible lens membrane, fluidic channel, and piezoelectric actuator. The main fabrication steps are described below. First, the patterened microstructure was used as a mold using photolithography processs and then using PDMS to cast over the mold. The cured PDMS was peeled off from the mold with the microchannel and circular chamber. Then, the PDMS mold was bonded on to the PDMS coated glass at temperature 100 ℃. Finally, using a piezoelectric actuator to drive the chamber membrane can control the flow rate precisely. To change the deformation of PDMS film by varying the microfluidic volume can achieve the desired variable focal length. A variable focus liquid lens with 3 mm in diameter and focus turning range from 33.51 to 11.14 mm was completed.
其他識別: U0005-2706200710205300
Appears in Collections:精密工程研究所

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