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標題: 利用商用印表機建構噴墨系統之應用研究
Design and application of an inkjet process system based on a commercial inkjet printer
作者: 林坤德
關鍵字: inkjet process;噴墨系統;commercial inkjet printer;nano-silver ink;商用印表機;奈米銀
出版社: 精密工程學系所
引用: [1] H. Rothe, A. Usbeck, D. Cibis and K. Krüger, “Characterisation of drop-on-demand printed conductive silver tracks,” Proc. SPIE vol. 5878, San Diego, 02-04 August 2005. [2] D. Cibis and K. Krüger, “Dod-printing of conductive silver tracks,” 1st International Conference on Ceramic Interconnect and Ceramic Microsystems Technologies, Baltimore, 10-13 April 2005. [3] A. M. J. van den Berg, A. W. M. de Laat, P. J. Smith, J. Perelaer and U. S. Schubert, “Geometric control of inkjet printed features using a gelating polymer,” J. Mater. Chem., vol. 17, pp. 677-683, 2006. [4] S. Molesa, D. Redinger, D. Huang and V. Subramanian, “High-quality inkjet-printed multilevel interconnects and inductive components on plastic for ultra-low-cost RFID applications,” J. Mater. Res. Soc., vol. 769, pp. H 8.3.1-8.3.6, 2003. [5] D. Redinger, R. Farshchi and V. Subramanian, “An all-printed passive component technology for low-cost RFID,” Digest of Device Research Conference, Salt Lake City, pp. 187-188, 23-25 June 2003. [6] D. Redinger, S. Molesa, Shong Yin, R. Farschi and V. Subramanian, “An ink-jet-deposited passive component process for RFID,” IEEE. Tran. Electron Devices, vol. 51, pp. 1978-1983, 2004. [7] L .P. Hue, “Progress and trend in ink-jet printing technology,” J. Imag. Sci. Technol., vol. 42, pp. 49-62, 1998. [8] S .F. Pond, “Inkjet technology and product development strategies,” Torrey Pines, USA, 2000. [9] R. A. Myers and J. C. Tamulis, “Introduce to topical issue on non-impact printing technologies,” J. IBM. Res. Dev., vol. 28, pp. 234-240, 1984. [10] F. G. Tseng, C. J. Kim and C. M. Ho, “A microinjector free of satellite drops and characterization of the ejected droplets,” J. Micro-Electro-Mechanical Systems, vol. 66, pp. 89-95, 1998. [11] P .H. Chen, W. C. Chen and S. H. Chang, “Bubble growth and ink ejection process of a thermal ink jet print-head,” Int. J. Mech. Sci, vol. 39, pp. 683-695, 1997. [12] F. G. Tseng, C. J. Kim and C. M. Ho, “A novel microinjector with virtual chamber,” IEEE. Micro-Electro-Mechanical Systems, vol. 8, pp. 57-62, 1998. [13] P. H. Chen, H. Y. Peng, H. Y. Liu, S. L. Chang, T. I. Wu and C. H Cheng, “Pressure response and droplet ejection of a piezoelectric inkjet printhead,” Int. J. Mech. Sci., vol. 41, pp. 235-248, 1999. [14] C. Robertson, “Printed circuit board designer''s reference: basics,” Prentice Hall PTR, New Jersey, 2003. [15] L. A. Jackson, K. B. Kelly, D. W. Pinkernell, S. O. Rasmussen and J. A. Widder, “Deskjet printer chassis and mechanism design,” J. Hewlett Packard, vol. 39, pp. 67-75, 1988. [16] 殷孟雲, “噴墨印表機設計原理,” 全華科技圖書股份有限公司, 2001. [17] K. J. Courian, J. L. Stoffel, R. A. Sader, K. A. Prasad, S. L. Webb, D. H. Donovan, J. G. Moritz, B. J. Keefe, S. W. Steinfield and W. D. Childers, “Reliable high performance drop generator for inkjet printhead,” U. S. Patent 5946012, 1999. [18] Hewlett-Packard, “DeskJet 1120C Professional series user''s guide,” 1997. [19] J. E. Stringer, P. J. Smith and B. Derby, “Droplet behaviour in inkjet printing,” Mater. Res. Soc., vol. 860 E, pp. LL 2.6.1-2.6.6, 2005. [20] 李賢學, “化學還原製備奈米銀及其應用,” 國立清華大學化學工程學系博士論文, 2005. [21] H. H. Lee, K. S. Chou and Z. W. Shih, “Effect of nano-sized silver particles on the resistivity of polymeric conductive adhesives,” J. Adhesion & Adhesives, vol.25, pp. 437-441, 2005. [22] K. S. Chou, K. C. Huang and H. H. Lee, “Fabrication and sintering effect on the morphologies and conductivity of nano-Ag particle films by the spin coating method,” Nanotechnology, vol. 16, pp. 779-784, 2005. [23] H. H. Lee, K. C. Huang and K. S. Chou, “Inkjet printing of nanosized silver colloids,” Nanotechnology, vol. 16, pp. 2436-2441, 2005.
本論文重點在設計製作一套可噴印繪製電路圖形的噴墨系統及其製程研究,期望能以噴墨技術製作印刷電路板及電子元件,提供有別於現有製造印刷電路板、電子元件中微影、蝕刻製程的製作方式,來達到降低成本、減少開發時程及環境污染,以符合未來趨勢的需求。此噴墨系統是以修改商用熱泡式HP1120C印表機的方式來建構噴墨系統,在建構噴墨系統的設計上,採用上銀科技精密線性模組KK6010P 搭配步進馬達及齒輪組,取代原有印表機滾筒式送紙機構,並且增設一個平板式加熱器及定位回歸系統,使系統能達到可噴印於軟性或硬脆不同的基材上、控制噴印基材的加熱溫度及進行重複噴印的功能需求。經實驗証實其所建構的噴墨系統噴印的解析度達到600 x 600 dpi,X軸及Y軸的重複精度達到±40μm,系統的最大噴印尺寸可達210mm × 297mm,可控制基板加熱溫度達到室溫200oC。
以此建構的噴墨系統試驗噴印奈米銀墨水,在使用HP51645A的噴墨頭,採用昇龍工業FA124奈米銀母液,其粒徑小於20nm、以調配墨水銀含量4%的奈米銀墨水進行噴印實驗,控制不同基材溫度於玻璃、PET、PI基材上,可得到其最小線寛可在100~150μm範圍之內的平滑線條;重覆噴印十層奈米銀墨水於基材溫度90 oC的玻璃基材上,再經過高溫烤箱280oC熱處理30分鐘後,其電阻率可達7.7μΩ-cm;實際噴印繪製出電路圖形於相片紙上,再接合電子元件於噴印後的電路圖形且經測試其功能正常,証明其所建講之噴墨系統其效能已可達製作一般印刷電路板之要求。

The purpose of this thesis is to design an inkjet system for microelectronic fabrication process using a commercial inkjet printer. The inkjet system is expected to be applied in microelectronic fabrication to achieve cost down, fast prototyping and less environmental pollution. We have developed this inkjet process system based on a commercial HP1120C inkjet printer. In order to enable our design functions such as auto-zero positioning, substrate temperature control and repeatable printing, a linear stage (HIWIN KK6010P) combined with gears and an additional substrate heating system were used to replace the original paper roller in the HP1120C inkjet printer. The performance of this inkjet process system can achieve resolution up to 600×600 dpi, drop placement accuracy of ±40μm, flat substrate up to 210 mm×297 mm in size, and substrate temperature control up to 200°C.
This printing system has been demonstrated using a nano-silver ink for microelectronic circuit fabrication. In these experiments, the nano-silver ink (particle size <20 nm) was filled in an HP 51645A ink cartridge and the solid content of nano-silver ink was adjust to be near 4%. It was found that the substrate temperature had a large effect on the printing linewidth. A smooth minimum linewidth of 100~150 μm can be controlled when various substrate materials (glass, polyethylene terephthalate and polymide) were used in this inkjet process system. Furthermore, the resistivity of the printed silver film can reach 7.7μΩ-cm after repeatable printing on the glass substrate (10 times, substrate temperature of 90°C, and post baking at 280°C for 30 min) using this nano-silver ink. These results confirm the capability of the developed inkjet process system.
其他識別: U0005-2908200712172600
Appears in Collections:精密工程研究所

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