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標題: The Effect of Photo-initiator on the Contrast Curve of Negative-work Photo-resist
作者: Huang, T.Y.
Cheng, W.T.
關鍵字: contrast curve;negative photoresist;photoinitiator;residual film;thickness;Irgacure OXE-02;cross-linking activity;acrylated prepolymers;photoinitiators;photochemistry;photoresists
Project: Journal of Photopolymer Science and Technology
期刊/報告no:: Journal of Photopolymer Science and Technology, Volume 24, Issue 6, Page(s) 643-646.
This paper aims to investigate the residual film thickness of negative photoresist with varied exposure dose after developmemt, namely, the contrast curve, affected by the photoinitiators. Three kinds of photoinitiators (Irgacure 369, Irgacure 907, and Irgacure OXE-02) were used as studied materials, blending with carboxylated cresol acrylic resin and trimethylolpropane triacrylate in co-solvent of propyleneglycol monomethyl ether acetate and cyclohexanone. As shown in the results, the photoinitiator grouped with oxime ester, such as Irgacure OXE-02, can be used to increase the contrast of negative-work photo-resist in the photolithography, and reduce the exposure dose needed for cross-linking reaction due to the more free radicals produced by the photoinitiator with a wider spectral absorption range. This suggests that the contrast curve method may be employed to optimize and integrate the photosensitive polymer in the photolithography process.
ISSN: 0914-9244
Appears in Collections:化學工程學系所

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