Please use this identifier to cite or link to this item: http://hdl.handle.net/11455/4181
標題: 應用於微組裝之振動致動之雙穩態機構
A VIBRATION-ACTUATED BISTABLE MICROMECHANISM FOR MICROASSEMBLY
作者: 范輝遵
Pham, Huy-Tuan
關鍵字: bistable;雙穩態機構;micromechanism;vibration;微機構;振動
出版社: 精密工程學系所
引用: REFERENCES Akiyama, T., Fujita, H., “A Quantitative Analysis of Scratch Drive Actu¬ator Using Buckling Motion,” Proceedings of the 1995 IEEE Micro Elec¬tro Mechanical Systems Conference, pp. 310-315, 1995. Alper, S.E., Silay, K.M., Akin, T., “A Low-Cost Rate-Grade Nickel Microgyroscope,” Sensors and Actuators A, Vol. 132, pp. 171-181, 2006. Barillaro, G., Molfese, A., Nanini, A., and Pieri, F., “Analysis, Simulation and Relative Performances of Two Kinds of Serpentine Springs,” Journal of Micromechanics and Microengineering, Vol. 15, pp. 736-746, 2005. Brown, E.R., “RF-MEMS Switches for Reconfigurable Integrated Circuits,” IEEE Transactions On Microwave Theory And Techniques, Vol. 46, No. 11, pp. 1868-1880, 1998. Butler, J.T., Bright, V.M., Cowan, W.D., “Average Power Control and Positioning of Polysilicon Thermal Actuators,” Sensors and Actuators A, Vol. 72, No. 1, pp. 88-97, 1999. Capanu, M., Boyd, J.G., Hesketh, P., “Design, Fabrication, and Testing of a Bistable Electromagnetically Actuated Microvalve,” Journal of Microelectromechanical Systems, Vol. 9, No. 2, pp. 181-189, 2000. Casals-Terre, J., Shkel, A., “Dynamic Analysis Of A Snap-Action Micromechanism,” Proceedings of IEEE on Sensors’04, Wien, pp. 1245-1248, 2004. Casals-Terre, J., Shkel, A., “Snap-Action Bistable Micromechanism Actuated By Nonlinear Resonance,” Proceedings of IEEE on Sensors’05, pp. 893-896, 2005. D’Souza, A.F., Garg, V.K, Advanced Dynamics: Modeling and Analysis, Prentice-Hall, New Jersey, 1984. Franssila, S., Introduction to Microfabrication, Wiley, 2004. Freudenreich, M., Mescheder, U.M., Somogyi, G., “Design Considerations and Realization of a Novel Micromechanical Bistable Switch,” Proceedings of the 12th International Conference on Solid State Sensors, Actuators and Microsystems, Tranducers’03, pp. 1096-1099, 2003. Gomm, T., Howell, L.L, “In-plane Linear Displacement Bistable Microrelay,” Journal of Micromechanics and Microengineering, Vol. 12, pp. 257-264, 2002. Halg, B., “On a Nonvolatile Memory Cell Based on Micro-Electro-Mechanics,” Proceedings IEEE Workshop on MEMS, pp. 172-176, 1990. Jensen, B.D., Howell, L.L., Salmon, L.G., “Design of Two-Link, In-Plane, Bistable Compliant Micro-Mechanisms,” Journal of Mechanical Design, Vol. 121, pp. 416-423, 1999 Jensen, B.D., “Identification of Macro- and Micro- Compliant Mechanism Configurations Resulting in Bistable Behavior,” M.S. Thesis, Brigham Young University, Provo, Utah, 1998. Jessen, B.D., Boer, M.P., Masters, N.D., Bitsie, F., Van, D.A., “Interferometry of Actuated Microcantilevers to Determine Material Properties and Test Structure Non- idealities in MEMS,” Journal of Microelectromechanical Systems, Vol. 10, No. 3, pp. 336-346, 2001. Koester, D., Cowen, A., Mahadevan, R., Stonefield, M., Hardy, B., PolyMUMPs Design Handbook, Rev 10.0, MEMSCAP, 2003. Kwon, H.N., Hwang, I.H., Lee, J.H., “A Pulse-operating Electrostatic Microactuator for Bi-stable Latching,” Journal of Micromechanics and Microengineering, Vol. 15, pp. 1511-1516, 2005. Lee, K.B., Pisano, A.P., Lin, L., “Nonlinear Behaviors of a Comb Drive Actuator Under Electrically Induced Tensile and Compressive Stresses,” Journal of Micromechanics and Microengineering, Vol. 17, pp. 557-566, 2007. Lott, C.D., McLain, T.W., Harb, J.N., Howell, L.L., “Modeling the Thermal Behavior of a Surface-micromachined Linear-displacement Thermomechanical Microactuator,” Sensors and Actuators A, Vol. 101, pp. 239-250, 2002. Luharuka, R., Hesketh, P., “A Bistable Electromagnetically Actuated Rotary Gate Microvalve,” Journal of Micromechanics and Microengineering, Vol. 18, pp. 1-14, 2008. Madou, M.J., Fundamentals of Microfabrication, CRC Press, 2002. Park, J.S., Chu, L.L., Siwapornsathain, E., Oliver, A.D., and Gianchandani, Y.B., “Long Throw and Rotary Output Electro-Thermal Actuators Based on Bent-Beam Suspensions,” The 13th Annual International Conference on MEMS, pp. 680-685, 2000. Parkinson, M.B., Jensen, B.D., Roach, G.M., “Optimization-Based Design of a Fully-Compliant Bistable Micromechanism,” Proceeding of DETC’00 ASME Design Engineering Technical Conferences, pp. 1-7, 2000. Qiu, J., Lang, J.H., Slocum, A.H., “A Curved-Beam Bistable Mechanism,” Journal of Microelectromechanical Systems, Vol. 13, No.2, pp. 137-146, 2004. Qiu, J., Lang, J.H., Slocum, A.H., Weber, A.C., “A Bulk-Micromachined Bistable Relay With U-Shaped Thermal Actuators,” Journal of Microelectromechanical Systems, Vol. 14, No.5, pp. 1099-1109, 2005. Riethmuller, W., Benecke, W., “Thermally Excited Silicon Microactuators,” IEEE Transactions on Electrical Devices, Vol. 35, No. 6, pp. 758-763, 1988. Saif, M.T.A., “On a Tunable Bistable MEMS - Theory and Experiment,” Journal of Microelectromechanical Systems, Vol. 9, No.2, pp. 157-170, 2000. Saitou, K., Wang, D.A., Wou, S.J., “Externally Resonated Linear Microvibromotor for Microassembly,” Journal of Microelectromechanical Systems, Vol. 9, No.3, pp. 336-346, 2000. Senturia, S.D., Microsystem Design, Kluwer academic, 2001. "SUMMiT V Five Level Surface Micromachining Technology Design Manual,” Version 1.3, MEMS Devices and Reliability Physiscs Department, Microelectronics Develop- ment Laboratory, Sandia National Lab¬oratories. Taylor, W.P., Brand, O., Allen, M.G., “Fully Integrated Magnetically Actuated Micromachined Relays,” Journal of Microelectromechanical Systems, Vol. 7, No.2, pp. 181-191, 1998. Tsay, J., Su, L.Q., Sung, C.K., “Design of a Linear Micro-Feeding System Featuring Bistable Mechanisms,” Journal of Micromechanics and Microengineering, Vol. 15, pp. 63-70, 2005. Vangbo, M., “An Analytical Analysis of a Compressed Bistable Buckled Beam,” Sensors and Actuators A, Vol. 69, pp. 212-216, 1998. Wagner, B., Quenzer, H.J., Hoerschelmann, S., Lisec, T., Juerss, M., “Bistable Micro- valve with Pneumatically Coupled Membranes,” The 9th Annual International Workshop on Micro Electro Mechanical System MEMS’96, pp. 384-388, 1996. Yang, Y.J., Liao, B.T., Kuo, W.C., “A Novel 2 × 2 MEMS Optical Switch Using the Split Cross-bar Design,” Journal of Micromechanics and Microengineering, Vol. 17, pp. 875-882, 2007. 馮智誠, “Fabrication of Comb Drive Microstructures by UV-LIGA Process,” M.S. Thesis, National Chung Hsing University, Taichung, Taiwan, 2007.
摘要: 
A novel method to switch an on-substrate bistable micromechanism is proposed. An external vibration is exploited to switch the micromechanism between its bistable positions. There is no need to build any actuators on substrate with this method. The vibration-actuated bistable micromechanism (VABM) is vibrated by shaking the entire substrate with a piezo actuator. The vibration provides a simple means of switching the VABM. Finite element analyses are utilized to obtain the nonlinear spring stiffness of the VABM and an analytical model is derived in order to analyze its dynamic behavior. Prototypes of the VABM are fabricated using electroforming. A scenario of the VABM for on-substrate fine positioning of micro components is presented.
URI: http://hdl.handle.net/11455/4181
其他識別: U0005-1707200811325000
Appears in Collections:精密工程研究所

Show full item record
 
TAIR Related Article

Google ScholarTM

Check


Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.