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標題: 設計一新微槳型樑結構量測銅薄膜材料之機械行為
Designing a novel paddle cantilever beam in measurement of the mechanical behavior of copper thin films
作者: 許信男
Hsu, Hsin-Nan
關鍵字: mechanical behavior;機械行為;paddle cantilever beam;微槳型樑試件
出版社: 精密工程學系所
引用: [1]. . [2]. [3]. [4].莊達人,”VLSI製造技術”,高立圖書有限公司,2003. [5].R.P.Vinci and J.J.Vlassak, “Mechanical behavior of thin films,”Annu. Rev. [6].W.D.Nix, “Mechanical Properties of Thin Films” p289, January,2005. [7]. I.N. Sneddon, International Journal of Engineering Science 3, 47(1965). [8].丁志華,管正平,黃新言,戴寶通,“奈米壓痕量測系統簡介”, 奈米通訊第九卷第三期. [9].B.Taljat, T.Zacharia, G.M.Pharr,” Pile-up behavior of spherical indentations in engineering materials”, Materials Research Society Symposium-Proceedings, Vol 522, Fundamentals of Nanoindentation and Nanotribology, p 33-38, 1998. [10].W.D.Nix, “Mechanical Properties of Thin Films” p71-73, January 2005. [11]. M. G. Allen, M. Mehregany and R. T. Howe, “Microfabricated structures for the in situ measurement of residual stress, Young’s modulus, and ultimate strain of thin films,” Applied Physics Letters 51 (4), 241-3 (1987). [12].A. J. Kalkman and A. H. Verbruggen, “High-temperature bulge-test setup for mechanical testing of free-standing thin films,” Rev. Sci. Instrum., Vol. 74, No. 3, March 2003. [13].R. Spolenak and W.L. Brown, “Bulge testing of mechanical properties of thin copper films,” Lucent Tech., Bell Labs Innovations (2000). [14].W.D.Nix, Metallurg. Trans. 20A 2217 (1-989). [15]. J.A.Schweitz, “Mechanical characterization of thin films by micromechanical techniques,” MRS Bulletin 17 (7), 34-45 (1992). [16].T.P.Weihs, S.Hong and J.C.Bravman, “Mechanical deflection of cantilever microbeams: a new technique for testing the mechanical properties of thin films,” Journal of Materials Research 3 (5), 931-42 (1988). [17]. tant_Stress.htm. [18]. [19].K. Najafi and K. Suzuki, “A novel technique and structure for the measurement of intrinsic stress and Young’s modulus of thin films,” Proceedings: IEEE Micro Electro Mechanical Systems. An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots (IEEE Cat. No.89THO249-3) , 96-7 (1989). [20].R. I. Pratt, G. C. Johnson and R. T. Howe ,“Characterization of thin filmsusing micromechanical structures,” Smart Materials Fabrication and Materials for Micro-Electro-Mechanical Systems , 197-202 (1992). [21].Ye et al, “Determination of the mechanical properties of microstructures”, Sensors and Actuators, A: Physical, Vol 54, n 1-3, June, 1996, p 750-754. [22].D.T.Read and J.W.Dally, “Strength, ductility, and fatigue life of aluminum thin films,” International Journal of Microcircuits and Electronic Packaging 16 (4), 313-18 (1993). [23].M.A. Haque and Saif, M.T.A., “In Situ Tensile Testing of nano-scale Specimens in SEM and TEM,” Experimental Mechanics, 42(1), 123-128 (2001). [24].M.A. Haque and Saif, M.T.A., Sensor and Actuator A 97-98 (2002) 239-245. [25]. R. Abermann and R. Koch, “The intrinsic stress of polycrystalline and epitaxial thin metal,” J. Phys.: Candens. Matter 6 (1994) p9519-9550. [26]. J.N. Florando and W.D. Nix, “A microbeam bending method for studying stress–strain relations for metal thin films on silicon substrates,” Journal of the Mechanics and Physics of solids 53 (2005) 619–638. [27]. Qian Kemao, Miao Hong and Wu Xiaoping,“Real-time polarization phase shifting technique for dynamic deformation measurement,” Optics and Lasers in Engineering 31 (1999) 289-295.

In this thesis ,a new technique for studying the mechanical behavior of nano-scale thin metal films on silicon substrate is presented. The test structure was designed on this novel “paddle” cantilever beam specimens with dimensions as few hundred nanometers to less than 10 nanometers. This beam is in triangle shape in order to provide uniform plane stress distribution. Standard clean room processing was used to prepare the paddle sample. The experiment can be operated by using the electrostatic deflection on the “paddle”cantilever beam and then measure the deposited thin metal film materials on top of it. The optical interference technique was used to measure the deflection of beam with the force.
其他識別: U0005-2208200813354200
Appears in Collections:精密工程研究所

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