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標題: 低電壓之壓電驅動膜片可變焦液態透鏡結合UV凸透鏡之研究
Research of combining variable focus lens with liquid and filled UV curing glue convex lens using low power piezoelectric driving membrane
作者: 郭明蒼
Kuo, Ming-Tzung
關鍵字: UV curing glue lens;微機電系統技術;iezoelectricity pieces;MEMS (Microelectromechanical System);thin plastic film;鎳壓電片;塑膠墊片;UV膠透鏡
出版社: 精密工程學系所
引用: 1.行政院國家科學委員會,微機電系統技術與應用,民國92年7月。 2.Fan, L. S., Tai, Y. C. and Muller, R. S. “IC-processed Electrostatic Micromotors,”Electron Devices Meeting, pp.666, 1988. 3.Ming Kang, Ruifeng Yue, et al.,“Meniscus Pinned Variable- focus Liquid Lens Based on Electrowetting-on- dielectric, ”Nano/Micro Engineered and Molecular Systems, pp.357-360, 2007. 4.Agarwal, M., Gunasekaran, R. A., Coane, P. and Varahramyan, K., “Polymer-based variable focal length microlens system,” Journal of Micromechanics and Microengineering, 14, pp. 1665-1673, 2004. 5.Ren, H., Fan, Y. H., Lin, Y. H. and Wu, S. T., “Electronically controlled liquid crystal yields tunable- focal-length lenses,” SPIE’s oemagazine, 4(9), pp. 25- 27, 2004. 6.楊中堯,液體注入式微型可變焦透鏡模組研製,國立中興大學碩士 論文,2006。 7.張朝智,壓電驅動膜片可變焦液態透鏡之研究,國立中興大學碩士 論文,2007。 8.Chen, J., Wang, W., Fang, J.and Varahramyan, K., “Variable-focusing microlens with microfluidic chip,” Journal of Micromechanics and Microengineering, 14, pp. 675-680, 2004. 9.Jeong, K. H., Liu, G. L., Chronis, N. and Lee, L. P., “Tunable microdoublet lens array,” Optics Express, 12 (11), pp. 2494-2500, 2004. 10.Chronis, N., Liu, G. L., Jeong, K. H. and Lee, L. P., “Tunable liquid-filled microlens array integrated with microfluidic network,” Optics Express, 11(19), pp. 2370- 2378, 2003. 11.Kuiper, S. and Hendriks, B. H. W., “Variable-focus liquid lens for miniature cameras,” Applied Physics Letters, 85(7), pp. 1128-1130, 2004. 12.Fan, O. Y., Wu, J. G. et al.,“Planar Variable-Focus Liquid Lens Based on Electrowetting on Dielectric,” Nano/Micro Engineered and Molecular Systems, pp.834-837, 2007. 13.Wang, W., Fang, J., and Varahramyan, K., “Compact variable-focusing microlens with integrated thermal actuator and sensor,” IEEE Photonics Technology Letters, Vol. 17, No. 12, 2005. 14.Choi, Y., Park, J. H., Kim, J. H. and Lee ,S. D., “Fabrication of a focal length variable microlens array based on a nematic liquid crystal,” Optical Materials, 21, pp. 643-646, 2002. 15.Cheng, C. C., Chang, C. A. and Yeh, J. A., “Variable focus dielectric liquid droplet lens,” Optics Express, pp. 4101~4106, 2006. 16.吳家棋,磁流變流體應用在可變焦光學透鏡之研究,國立台灣大 學論文,2004 17.Ren, H., Fan, Y. H. and Wu, S. T., “Polymer network liquid crystals for tunable microlens arrays,” Journal of Physics D: Applied Physics, 37, pp.400-403, 2004. 18.Hecht, E., Optics, Addison Wesley, CA: University Adelphi, pp. 262- 268, 2002. 19.耿繼業,幾何光學,全華科技圖書股份有限公司,2006。 20.孫慶成,光電概論,全華科技圖書股份有限公司,2004。 21.莊達人,VLSI製造技術,高立圖書有限公司,2000。 22.Zemax快速學習手冊,訊技科技股份有限公司。 23.吳朗,電子陶瓷入門,全欣資訊圖書有限公司,1992。 24.黃俊瑋,以類LIGA技術與紫外光固化膠製作微透鏡陣列之新型製 程設計探討,國立中興大學碩士論文,2004。 25.丁群修,可變焦液體透鏡之製程研發,國立中興大學碩士論文, 2005。
本論文在敘述製作低電壓式驅動之液態變焦透鏡的方法,利用微機電系統技術(MEMS)中的LIGA–like技術作出變焦透鏡之本體結構。針對驅動方式,本文利用延展性佳的鎳壓電片作為驅動主體,其中為了提升驅動電壓之效益,在壓電片上方黏貼一長16 mm,寬15mm,厚度為0.11mm,中間挖孔(直徑9mm)之塑膠墊片,使驅動電壓降為原先三分之一,於施加電壓0~60V下,焦距變化達到12~32mm。於此之後根據變焦效果的需要,利用UV膠透光性佳、成本低,將UV膠滴定於透鏡腔體中,形成一凸透鏡,藉由變焦透鏡與UV膠透鏡結合,焦距變化達到8.3~24.5mm範圍的低焦距效果。

The research is to describe about method with low power Piezoelectricity for fabricating variable focus plan-convex convex liquid lens, using LIGA-like in MEMS (Microelectromechanical System) to fabricate the main body structure of the variable focus lens. For driving type, the nickel piezoelectricity piece which has the good ductility was used. To promote the efficiency of the driving voltage, after piezoelectricity piece bonded, increases a hollow plastic film, which is the top 16 mm, 15 mm width, thickness of 0.11 mm and 9 mm diameter intermediate hollowing out, above the piezoelectricity piece, and causes the driving voltage to reduce 1/3 than that has no plastic film. With driving voltage 0~60V, liquid variable focus lens achieves 12~31mm the focal distance range variation. According to range of the focal distance, dropping UV glue which is crystalline and unexpensive into lens cavity with UV rays, and then forms as soon as solidifies the convex lens. Combining UV curing glue convex lens and variable focus lens, the focal distance range achieves the 8.3~24.5 mm low focal distance effect.
其他識別: U0005-2407200816244300
Appears in Collections:精密工程研究所

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