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Design, fabrication and characterization of a magnetically actuated Co-Ni bistable micromechanism
|關鍵字:||MEMS;微機電系統;electrodeposition;sacrificial layer;compliant bistable mechanism;magnetic force;電沉積;犧牲層;撓性雙穩態機構;磁力致動||出版社:||精密工程學系所||引用:||國科會精密儀器發展中心，2003，微機電系統技術與應用，初版，精密儀器發展中心出版，新竹市。 陳建人，民國92年，微機電系統技術與應用，行政院國家科學委員會精密儀器發展中心出版。 王大倫 譯，民國86年，實用電鍍學，財團法人徐氏基金會。 Edward M. Purcell, 1992, Electricity and Magnetism, McGraw-Hill Allen Bai, Chi-Chang Hu, "Effects of electroplating variables on the composition and morphology of nickel-cobalt deposits plated through means of cyclic voltammetry," Electrochimica Acta , 47 (2002) , 3447-3456 Akiyama, T., Collard, D., and Fujita, H., (1997), “Scratch Drive Actuator with Mechanical Links for Self-assembly of Three Dimensional MEMS,” Journal of Microelectromechanical Systems, Vol. 6, pp. 10-17. Smits, J.G., (1992), “Design Consideration of a Piezoelectric-on-Silicon Microrobot,” Sensors and Actuators, Vol. 35, No. 2, pp. 129-135. 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Voesing, "Stroboscopic digital speckle pattern interferometry for vibration analysis of microsystem," Optics and Lasers in Engineering, 47(2009), 252-258 Lianxiang Yang and Paul Colbourne, "Digital laser microinterferometer and its applications," Opt. Eng., 42(5) 1417–1426 (May 2003) L.X. Yang, W. Steinchen, M.Schuth and G. Kupfer, "Precision measurement and nondestructive testing by means of digital phase shifting speckle pattern and speckle pattern shearing interferometry," Measurement 16, 149–160 (1995) K. Creath, "Phase-shifting speckle interferometry," Appl. Opt., 24(18)(1985),3053-3058 J.C. Wyant and C.L. Kolioposlos, "An Optical Profilometer for Surface Characterization of Magnetic Media," ASLE Trans. 27, 101 (1984) Butters, J. N. and Leendertz, J. A. , "Holographic and Video Techniques. Applied to Engineering Measurement," Journal of Measurement and Conrol, Vol.4, pp.349-354 ,(1971)||摘要:||
A compliant bistable mechanism is investigated in this research. It is actuated by the Lorenz force. The design parameters are displacement, bistability, and the Lorenz force. With current applied to the bistable mechanism, the displacement and the reaction force of the compliant bistable mechanism are investigated.
UV-LIGA process are used for fabrication of the prototypes. We use photolithography and electrodeposition to fabricate CoNi compliant bistable microstructures on glass substrates. On the fabrication aspect, taking advantage of good adhesion and selectively etching properties between Cu and CoNi, we use Cu as the sacrificial layer to fabricate the CoNi compliant bistable mechanism.
A versatile vibrometer for characterizing in-plane motion of microelectromechanical system (MEMS) is developed. It combines conventional optical components and a He-Ne Laser with incremental phase shifts. The system drives a digital charge-coupled device camera to record a video sequence of the moving structures frozen by the laser at twelve equally spaced phases. The periodic motion of the prototypes is estimated by computing the values of displacements between successive images. The natural frequencies of the prototypes are determined. The experimental results are in good agreement with those based on a MEMS Motion AnalyzerTM (MMA G2, Umech Technologies, USA).
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