Please use this identifier to cite or link to this item:
標題: 一個磁力致動的鈷鎳雙穩態機構的設計製造與特性分析
Design, fabrication and characterization of a magnetically actuated Co-Ni bistable micromechanism
作者: 邱延賜
Chiu, Yen-Si
關鍵字: MEMS;微機電系統;electrodeposition;sacrificial layer;compliant bistable mechanism;magnetic force;電沉積;犧牲層;撓性雙穩態機構;磁力致動
出版社: 精密工程學系所
引用: 國科會精密儀器發展中心,2003,微機電系統技術與應用,初版,精密儀器發展中心出版,新竹市。 陳建人,民國92年,微機電系統技術與應用,行政院國家科學委員會精密儀器發展中心出版。 王大倫 譯,民國86年,實用電鍍學,財團法人徐氏基金會。 Edward M. Purcell, 1992, Electricity and Magnetism, McGraw-Hill Allen Bai, Chi-Chang Hu, "Effects of electroplating variables on the composition and morphology of nickel-cobalt deposits plated through means of cyclic voltammetry," Electrochimica Acta , 47 (2002) , 3447-3456 Akiyama, T., Collard, D., and Fujita, H., (1997), “Scratch Drive Actuator with Mechanical Links for Self-assembly of Three Dimensional MEMS,” Journal of Microelectromechanical Systems, Vol. 6, pp. 10-17. Smits, J.G., (1992), “Design Consideration of a Piezoelectric-on-Silicon Microrobot,” Sensors and Actuators, Vol. 35, No. 2, pp. 129-135. Ballandras, S., Daniau, W., Basrour, S., and Robert, L., (1995), “Deep Etch X-ray Lithography Using Silicon-gold Masks Fabricated by Deep Etch UV Lithography and Electroforming,” Journal Micromechanics and Microengineering, Vol, 5, pp. 203-208. Becker, E.W., Ehrfeld, W., Hagmann, P., Maner, A., and Muchmeyer, D., (1986), “Fabrication of microstructures with high aspect ration and great structural heights by synchrotron radiation lithography, galvanoforming and plastic moulding(LIGA process),” Microelectronic Engineering, Vol. 4, pp. 35-36. Butler, J.T., Bright, V.M., and Cowan, W.D., (1999), “Average Power Control and Positioning of Polysilicon Thermal Actuators,” Sensors and Actuators A, Vol. 72, pp. 88-97. Chu, P.B., and Pister, K.S., (1994), “Analysis of Closed-loop Control of Parallel-plate Electrostatic Microgrippers,” IEEE International Conference on Robotics and Automation, pp. 820-825. Comtois, J.H., and Bright, V.M., (1997), “Applications for Surface-Micromachined Polysilicon Thermal Actuators and Arrays,” Sensors and Actuators, Vol. 51, No. 1, pp. 19-25. Comtois, J.H, Bright, V.M, and Phipps, M., (1995), “Thermal Micro-Actuators for Surface- Micromaching Process,” Proceedings SPIE Micro-machined Devices and Components, Vol. 2642, pp. 10-21. Fujita, H., (1989), “Microactuators for Micro-motion System,” The Third Toyota Conference, pp. 279-295. Guckel, H., Klein, J., Christenson, T., Skrobis, K., Laudon, M., and Lovell, E.G., (1992), “Thermo-Magnetic Metal Flexure Actuators,” Solid-State Sensor and Actuator Workshop, 5th Technical Digest, IEEE, pp. 73 -75. Hayashi, T., (1999), “Research and Development of Micromechanisms”, Proceedings of Tenth World Congress on the Theory of Machine and Mechanisms, pp. 18-23. Parkinson, M.B., Jensen, B.D., and Roach, G.M., (2000), “Optimization-Based Design of a Fully-Compliant Bistable Micromechanism,” Proceedings of DETC 00 ASME 2000 Design Engineering Technical Conferences and Computers and Information in Engineering Conference Baltimore, pp. 1-7. Que, L., Park, J. S., and Gianchandani, Y. B., (1999), “Bent-beam Electro-thermal Actuators for High Force Applicators,” Micro Electro Mechanical Systems, MEMS ‘99. Twelfth IEEE International Conference, pp. 17 –21. Riethmuller, W., and Benecke, W., (1988), “Thermally Excited Silicon Microactuators”, IEEE Transactions On Electron Devices, Vol 35, No. 6, pp. 758-763. Romankiw, L.T., (1997), “A path: from electroplating through lithographic masks in electronics to LIGA in MEMS,” Electrochimica Acta, Vol. 42, No. 20-22, pp. 2985 -3005. Wagner, B., and Benecke, W., (1991), “Microfabricated Actuator With Moving Permanent Magnet,” Proceeding IEEE MEMS¬’91, Nara, Japan, 27, pp. 27-32. Sun, X., Farmer, K.R., and Carr, M.N., (1998), “A Bistable Microrelay Based on Twosegment Multimorph Cantilever Actuators,” Proceedings of IEEE Workshop on MEMS, pp. 154-159. Yang, Y.J., Liao, B.T., and Kuo, W.C., (2007), “A Novel 2 × 2 MEMS Optical Switch Using the Split Cross-bar Design,” Journal of Micromechanics and Microengineering, Vol. 17, pp. 875-882. J.Casals-Terré, M. Duch, J. A. Plaza, J. Esteve, R. Pérez-Castillejos, E. Vallés, E. Gómez, "Design, fabrication and characterization of an externally actuated ON/OFF microvalve , "Sensors and Actuators A 147 (2008) 600–606 J.W. Judy. R.S. Muller., and H.H.Zappe, "Magnetic Microactuatuion of Polysilicon Flexure Structures,"Journal of Micro Electromechanical systems, 4 (4) (1995), 162-169 H,Guckel, K. J. Skrovis, T. R. Christenson, J. Klein, S. Han B. Choi, E. G. Lovell, and T. W. Chanman, "Fabrication and testing of the planar Magnetic micromotor, " J. Micro-Mech. Microeng., vol. 1, no. 3, pp.135-138, 1991 M. Duch, J. Esteve, E. Gómez, R Perez-Castillejos and E Vallés, "Electrodeposited Co-Ni alloys for MEMS," J. Micromech. Microeng., 12 (2002), 400-405 D. Golodnitsky, N. V. Gudin, and G. A. Volyanuk, "Study of Nickel-Cobalt Alloy Electrodeposition from a Sulfamate Electrolyte with Different Anion Additives," Journal of The Electrochemical Society, 147 (11), 4156-4163 (2000) E. Gómez, J.Ramirez, E. Vallés, "Electrodeposition of Co-Ni alloys, " Journal of Applied Electrochemistry, 28 (1998), 71-79 Chonglun Fan and D. L. Piron, "Study of Anomalous Nickel-Cobalt Electrodeposition with Different Electrolytes and Current Densities," Electrochimica Acta. Vol. 41, No. 10, pp. 1713-1719, 1996 Chonglun Fan, D. L. Piron, M. Meilleur and L. -P. Marin, "Hydrogen Evolution in Alkaline Solution on Electrolytic Nickel-Cobalt and Nickel-Iron DeDosited with Different Bath Compositions and &rent Densities," the Canadian Journal of Chemical Engineering., Volume 71., August. 1993 L.X. Yang, M. Schuth, D. Thomas, Y.H. Wang, F. Voesing, "Stroboscopic digital speckle pattern interferometry for vibration analysis of microsystem," Optics and Lasers in Engineering, 47(2009), 252-258 Lianxiang Yang and Paul Colbourne, "Digital laser microinterferometer and its applications," Opt. Eng., 42(5) 1417–1426 (May 2003) L.X. Yang, W. Steinchen, M.Schuth and G. Kupfer, "Precision measurement and nondestructive testing by means of digital phase shifting speckle pattern and speckle pattern shearing interferometry," Measurement 16, 149–160 (1995) K. Creath, "Phase-shifting speckle interferometry," Appl. Opt., 24(18)(1985),3053-3058 J.C. Wyant and C.L. Kolioposlos, "An Optical Profilometer for Surface Characterization of Magnetic Media," ASLE Trans. 27, 101 (1984) Butters, J. N. and Leendertz, J. A. , "Holographic and Video Techniques. Applied to Engineering Measurement," Journal of Measurement and Conrol, Vol.4, pp.349-354 ,(1971)
A compliant bistable mechanism is investigated in this research. It is actuated by the Lorenz force. The design parameters are displacement, bistability, and the Lorenz force. With current applied to the bistable mechanism, the displacement and the reaction force of the compliant bistable mechanism are investigated.
UV-LIGA process are used for fabrication of the prototypes. We use photolithography and electrodeposition to fabricate CoNi compliant bistable microstructures on glass substrates. On the fabrication aspect, taking advantage of good adhesion and selectively etching properties between Cu and CoNi, we use Cu as the sacrificial layer to fabricate the CoNi compliant bistable mechanism.
A versatile vibrometer for characterizing in-plane motion of microelectromechanical system (MEMS) is developed. It combines conventional optical components and a He-Ne Laser with incremental phase shifts. The system drives a digital charge-coupled device camera to record a video sequence of the moving structures frozen by the laser at twelve equally spaced phases. The periodic motion of the prototypes is estimated by computing the values of displacements between successive images. The natural frequencies of the prototypes are determined. The experimental results are in good agreement with those based on a MEMS Motion AnalyzerTM (MMA G2, Umech Technologies, USA).
其他識別: U0005-0602201000180100
Appears in Collections:精密工程研究所

Show full item record

Google ScholarTM


Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.