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標題: 高精度多通道光纖之平行定位模仁製程
Process development of high precision multiple -channel optical fibers in parallel alignment mold inserts
作者: 林格年
Lin, Ge-Nian
關鍵字: V-groove;V型溝槽;anisotropic etch;photolithography;Fiber array;非等向性蝕刻;黃光微影;光纖陣列
出版社: 精密工程學系所
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The purpose of this study is to develop multi-channel molds for optical fiber alignment with high precision. High selective wet-etching process to fabricate multi-channel grooves for fiber alignment on Si(100) was used. It has the potential advantage to replace the conventional grinding process for v-groove production. The (100)-oriented Si wafers were used as starting substrates and then epitaxied with silicon dioxide or silicon nitride. Furthermore, samples were patterned (using photoresist), which the protected region was silicon dioxide or silicon nitride while the v-groove can be formed in the unprotected region after removal of passivation layer and KOH etching. Silicon anisotropic etching can result the desired V-grooves in silicon.Optimal etching conditions, including the etchant concentration, temperature and time can determine the etching rate and etching depth for V-groove producing micro-structures. The number of fiber channel can be defined from the mask design. Fiber channels of 32 will be the final research target. That can convert into metal molds by electroforming process, decrease the error rate under 0.3%. The implementation of a large number of multi-channel optical fiber positioning replication modules, with high precision, to reduce costs and demand for optical communication industry will be feasible.
其他識別: U0005-0107201012233400
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