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標題: 一個用於能量收集的微流道之設計與製作
Design and fabrication of a microchannel for energy harvesting
作者: 紀喬棟
Ji, Qiao-Dong
關鍵字: 微流道;microchannel;卡門渦列;能量收集;Karman vortex;energy harvesting
出版社: 精密工程學系所
引用: Cheng, Z.Y., Zhang, Q.M., Su, J., Tahchi, M.E., “ Piezoelectric and Acoustic Materials for Transducer Applications,” pp. 131 - 155, 2008. Kaneko, T., Ohmi, T., Ohya, N., Kawahara, N., Hattori, T., A new, “compact and quick-response dynamic focusing lens,” Proceedings of International Conference on Solid State Sensors and Actuators, Vol. 1, pp. 63 – 66, 1997. Bergander, A., Driesen,W., Varidel, T, Bregust, J. -M., “Monolithic piezoelectric push-pull actuators for inertial drives,” Proceedings of International Symposium on Micromechatronics and Human Science, pp. 309 – 316, 2003. Kwon, O.-D., Yoo, J.-S., Yun, Y.-J., Lee, J.-S.,Kang, S.-H., Lin, K.-J., “A research on the piezoelectric vibration actuator for mobile phone, Proceedings of nternational Symposium on Electrical Insulating Materials,” Vol. 3, pp. 676 – 678, 2005. Kolesar, Jr. E. S., Dyson, C. S., “Object imaging with a piezoelectric robotic tactile sensor,” Journal of Microelectromechanical Systems, Vol. 4, pp. 87- 96, 1995. Ravariu, C., Ravariu, F., Rusu, A., Dobrescu, D., Dobrescu , L., Popa , C., Chiran I., “A new job for the pseudo-MOS transistor: working in the pressure sensors field,” Proceedings of the 9th International Conference on Electronics, Circuits and Systems, Vol. 1, pp. 215 – 218, 2002. K. Hosokawa, K. Sato, N. Ichikawa, and M. Maeda, “Power-Free Poly(dimethylsiloxane) Microfluidic Devices for Gold Nanoparticle-Based DNA Analysis,” Lab On A Chip, vol. 4, pp. 181-185, 2004. M. Sanchez-Sanz, B. Fernandez, and A. Velazquez, “Energy-Harvesting Microresonator Based on the Forces Generated by the Kármán Street around a Rectangular Prism,” Journal of Microelectromechanical Systems, vol. 18, pp. 449-457, 2009. P. K. Sahu, A. Golia, A. K. Sen, “Analytical, numerical and experimental investigations of mixing fluids in microchannel,” Microsyst Technol, vol. 18, pp. 823-832, 2012. Shou-Shing Hsieh, Chih-Yi Lin, Chin-Feng Huang and Huang-Hsiu Tsai,“Liquid flow in a micro-channel”J. Micromech. Microeng, vol. 14, pp. 436–445, 2004. Bjarne Helho, Anders Kristensen, and Aric Menon, Mikroelektronik Centret , Technical University of Denmark ,“Micro-cavity fludic dye laser,”Journal of Micromechanics and Microengineering, vol. 13, pp. 307-311, 2003. Kensaku Yamamoto, Keisuke Naka, Yasuhiro Nagaura, Hironobu Sato, Shuichi Shoji and Satoshi Konishi, “Pyrolyzed polymer mesh electrodeintegrated into fluidic channel for gate type sensor,”MEMS, pp. 271-274, 2007. L Gutierrez-Rivera, J Martinez-Quijada, R Johnstone, D Elliott, C Backhouse and D Sameoto, “Multilayer bonding using a conformaladsorbate film (CAF) for the fabrication of 3D monolithic microfluidic devices in photopolymer,” Journal of Micromechanics and Microengineering, vol. 22, pp. 8-20, 2012. Byung-Ho Jo, Linda M. Van Lerberghe, Kathleen M. Motsegood, and David J. Beebe, “Three-dimensional micro-channel fabrication in polydimethylsiloxane (PDMS) elastomer,”Journal of microelectromechanical systems, vol. 9, pp. 76-81, 2000. Da-Jeng Yao and Po-Yu Chen, “Room temperature microchannel fabrication for microfluidic system,”Nanotechnology, pp. 122 – 125, 2007. Dung-An Wang, Huy-Tuan Pham, Chia-Wei Chao, Jerry M. Chen,“A Piezoelectric Energy Harvester Based on Pressure Fluctuations in Kármán Vortex Street,” World Renewable Energy Congress , 2011.
在製程方面,本研究採多層結構堆疊出流道,以負光阻(JSN126N)製作微流道後利用聚二甲基矽氧高分子(Polydimethylsiloxane, PDMS)作為振動薄膜貼在流道表面上,利用水通過流道時聚二甲基矽氧高分子薄膜所產生的變化來量測所產生的震動位。

In this study, the Karman Street was used to harvest the energy from the microchannel structure. The movement of the energy harvester is from the stable fluid flow through a semi-oval baffle which was made in the channel and the flow distribution triggers the Karman Street to yield vibration with constant frequency.
The channels were fabricated by multilayer structures. After using negative photoresist to fabricate the microchannel, a polydimethylsiloxane (PDMS) membrane was pasted on the surface of the microchannel and the vibrational potential was measured using the water flow through the polymer membrane to yield the variation of the potential.
The measured data was easily damaged when the micro-fluidic channel was full of water because the baffle was made by photoresist. Therefore, we fabricated an acrylic microchannel with one to two times bigger by a carving machine and the concept of micro-fluidic channel was feasible using the measurement of this study.
其他識別: U0005-1908201311314000
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