Please use this identifier to cite or link to this item: http://hdl.handle.net/11455/4282
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dc.contributor王東安zh_TW
dc.contributorDung-An Wangen_US
dc.contributor.author紀喬棟zh_TW
dc.contributor.authorJi, Qiao-Dongen_US
dc.contributor.other精密工程學系所zh_TW
dc.date2013en_US
dc.date.accessioned2014-06-06T06:27:27Z-
dc.date.available2014-06-06T06:27:27Z-
dc.identifierU0005-1908201311314000en_US
dc.identifier.citationCheng, Z.Y., Zhang, Q.M., Su, J., Tahchi, M.E., “ Piezoelectric and Acoustic Materials for Transducer Applications,” pp. 131 - 155, 2008. Kaneko, T., Ohmi, T., Ohya, N., Kawahara, N., Hattori, T., A new, “compact and quick-response dynamic focusing lens,” Proceedings of International Conference on Solid State Sensors and Actuators, Vol. 1, pp. 63 – 66, 1997. Bergander, A., Driesen,W., Varidel, T, Bregust, J. -M., “Monolithic piezoelectric push-pull actuators for inertial drives,” Proceedings of International Symposium on Micromechatronics and Human Science, pp. 309 – 316, 2003. Kwon, O.-D., Yoo, J.-S., Yun, Y.-J., Lee, J.-S.,Kang, S.-H., Lin, K.-J., “A research on the piezoelectric vibration actuator for mobile phone, Proceedings of nternational Symposium on Electrical Insulating Materials,” Vol. 3, pp. 676 – 678, 2005. Kolesar, Jr. E. S., Dyson, C. S., “Object imaging with a piezoelectric robotic tactile sensor,” Journal of Microelectromechanical Systems, Vol. 4, pp. 87- 96, 1995. Ravariu, C., Ravariu, F., Rusu, A., Dobrescu, D., Dobrescu , L., Popa , C., Chiran I., “A new job for the pseudo-MOS transistor: working in the pressure sensors field,” Proceedings of the 9th International Conference on Electronics, Circuits and Systems, Vol. 1, pp. 215 – 218, 2002. K. Hosokawa, K. Sato, N. Ichikawa, and M. Maeda, “Power-Free Poly(dimethylsiloxane) Microfluidic Devices for Gold Nanoparticle-Based DNA Analysis,” Lab On A Chip, vol. 4, pp. 181-185, 2004. M. Sanchez-Sanz, B. Fernandez, and A. Velazquez, “Energy-Harvesting Microresonator Based on the Forces Generated by the Kármán Street around a Rectangular Prism,” Journal of Microelectromechanical Systems, vol. 18, pp. 449-457, 2009. P. K. Sahu, A. Golia, A. K. Sen, “Analytical, numerical and experimental investigations of mixing fluids in microchannel,” Microsyst Technol, vol. 18, pp. 823-832, 2012. Shou-Shing Hsieh, Chih-Yi Lin, Chin-Feng Huang and Huang-Hsiu Tsai,“Liquid flow in a micro-channel”J. Micromech. Microeng, vol. 14, pp. 436–445, 2004. Bjarne Helho, Anders Kristensen, and Aric Menon, Mikroelektronik Centret , Technical University of Denmark ,“Micro-cavity fludic dye laser,”Journal of Micromechanics and Microengineering, vol. 13, pp. 307-311, 2003. Kensaku Yamamoto, Keisuke Naka, Yasuhiro Nagaura, Hironobu Sato, Shuichi Shoji and Satoshi Konishi, “Pyrolyzed polymer mesh electrodeintegrated into fluidic channel for gate type sensor,”MEMS, pp. 271-274, 2007. L Gutierrez-Rivera, J Martinez-Quijada, R Johnstone, D Elliott, C Backhouse and D Sameoto, “Multilayer bonding using a conformaladsorbate film (CAF) for the fabrication of 3D monolithic microfluidic devices in photopolymer,” Journal of Micromechanics and Microengineering, vol. 22, pp. 8-20, 2012. Byung-Ho Jo, Linda M. Van Lerberghe, Kathleen M. Motsegood, and David J. Beebe, “Three-dimensional micro-channel fabrication in polydimethylsiloxane (PDMS) elastomer,”Journal of microelectromechanical systems, vol. 9, pp. 76-81, 2000. Da-Jeng Yao and Po-Yu Chen, “Room temperature microchannel fabrication for microfluidic system,”Nanotechnology, pp. 122 – 125, 2007. Dung-An Wang, Huy-Tuan Pham, Chia-Wei Chao, Jerry M. Chen,“A Piezoelectric Energy Harvester Based on Pressure Fluctuations in Kármán Vortex Street,” World Renewable Energy Congress , 2011.en_US
dc.identifier.urihttp://hdl.handle.net/11455/4282-
dc.description.abstract本文是探討利用卡門渦列作用驅動來收集能量的微流道結構,此能量收集器的主要動作方式系由以一穩定的流體流入流道內,並在流道內製作一半橢圓型阻擋物,藉由水流流過此阻擋物而在其後方流場引發卡門渦列作用以產生具有固定頻率之振動。 在製程方面,本研究採多層結構堆疊出流道,以負光阻(JSN126N)製作微流道後利用聚二甲基矽氧高分子(Polydimethylsiloxane, PDMS)作為振動薄膜貼在流道表面上,利用水通過流道時聚二甲基矽氧高分子薄膜所產生的變化來量測所產生的震動位。 但由於微流道的障礙物是利用光阻所製作出來的,當流道注水時相當容易造成毀損影響量測時的數據,所以我們利用雕刻機製作一兩倍尺寸的壓克力微流道,並利用此流道量測來證實本文所設計的微流道概念是可行的。zh_TW
dc.description.abstractIn this study, the Karman Street was used to harvest the energy from the microchannel structure. The movement of the energy harvester is from the stable fluid flow through a semi-oval baffle which was made in the channel and the flow distribution triggers the Karman Street to yield vibration with constant frequency. The channels were fabricated by multilayer structures. After using negative photoresist to fabricate the microchannel, a polydimethylsiloxane (PDMS) membrane was pasted on the surface of the microchannel and the vibrational potential was measured using the water flow through the polymer membrane to yield the variation of the potential. The measured data was easily damaged when the micro-fluidic channel was full of water because the baffle was made by photoresist. Therefore, we fabricated an acrylic microchannel with one to two times bigger by a carving machine and the concept of micro-fluidic channel was feasible using the measurement of this study.en_US
dc.description.tableofcontents誌謝 i 摘要 ii Abstract iii 目錄 iv 表目錄 vi 圖目錄 vii 第一章 緒論 1 1.1 動機 1 1.2 研究背景 1 1.2.1微流體晶片 2 1.3 文獻回顧 3 1.3.1流道用於能量轉換的例子 3 1.3.2微流道製程例子 3 1.4 論文架構 4 第二章 設計概念與動作原理 9 2.1 操作原理 9 2.2 設計概念 9 2.3 馮卡門渦列理論 10 2.4 壓電理論 11 2.4.1壓電材料 11 2.4.2壓電效應 11 2.4.3壓電操作模式 12 第三章 實驗方法與架構 18 3.1 製程步驟 18 3.1.1流道結構 18 3.1.2震動薄膜結構 18 3.2 黃光微影製程 19 3.3.1.基材前處理 19 3.3.2黃光微影製程步驟 19 3.3 薄膜測厚儀(α-step)量測 19 3.4 電鍍製程 20 3.4.1電鍍步驟 20 3.4.2溶銅實驗 20 3.5 微組裝平台對位系統 20 3.5.1微組裝平台對位系統實驗步驟 21 第四章 實驗架構與量測 31 4.1 實驗架構 31 4.2 量測 31 4.2.1位移量測 31 4.3 頻率轉換 32 4.4 結果討論 32 第五章 結論與未來展望 41 5.1 結論 41 5.2 未來展望 41 參考文獻 42zh_TW
dc.language.isozh_TWen_US
dc.publisher精密工程學系所zh_TW
dc.relation.urihttp://www.airitilibrary.com/Publication/alDetailedMesh1?DocID=U0005-1908201311314000en_US
dc.subject微流道zh_TW
dc.subjectmicrochannelen_US
dc.subject卡門渦列zh_TW
dc.subject能量收集zh_TW
dc.subjectKarman vortexen_US
dc.subjectenergy harvestingen_US
dc.title一個用於能量收集的微流道之設計與製作zh_TW
dc.titleDesign and fabrication of a microchannel for energy harvestingen_US
dc.typeThesis and Dissertationzh_TW
item.openairetypeThesis and Dissertation-
item.openairecristypehttp://purl.org/coar/resource_type/c_18cf-
item.grantfulltextrestricted-
item.fulltextwith fulltext-
item.cerifentitytypePublications-
item.languageiso639-1zh_TW-
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