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標題: 含有主動釋放機制的微夾鉗之設計與分析
Design and analysis of a microgripper with an active release mechanism
作者: 林政彥
Lin, Cheng-Yen
關鍵字: 微機電系統;MEMS;電沉積;撓性雙穩態結構;微夾鉗;electrodeposition;compliant bistable mechanism;microgripper
出版社: 精密工程學系所
引用: [1]. Ran Zhang, Jinkui Chu, Haixiang Wang, Zhaopeng Chen, 2013, “A multipurpose electrothermal microgripper for biological,” Microsystem Technologies, 2013, Volume 19, Issue 1, pp 89-97 [2]. M. Mehdi S. Mousavi, Giorgio De Pasquale, Aurelio Soma, Eugenio Brusa,2011, “A novel SU-8 microgripper with external actuator for biological cells manipulation,” Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP), 2011 Symposium, pp. 356 - 361 [3]. Brandon K. Chen, Yong Zhang, and Yu Sun, 2009, “Active release of microobjects using a MEMS microgripper to overcome adhesion forces,” Journal of Microelectromechanical Systems, Vol. 18, No. 3, June 2009, pp. 1057-7157 [4]. Jose A. Martinez, Roberto R. Panepucci, 2007, “Design, fabrication, and characterization of a microgripper device,” Florida Conference on Recent Advances in Robotics, FCRAR 2007 [5]. Nawaz Ali, M.M.Hassan and Rana I. Shakoor, 2011, “Design, modeling and simulation of electrothermally actuated microgripper with integrated capacitive contact sensor,” Multitopic Conference (INMIC), 2011 IEEE 14th International, pp. 201 - 206 [6]. Trinh Chu Duc, Gih-Keong Lau, J. Fredrik Creemer, and Pasqualina M. Sarro, 2008, “Electrothermal microgripper with large jaw displacement and integrated force sensors,” Journal of Microelectromechanical Systems, Vol. 17, No. 6, December 2008, pp. 1546 - 1555 [7]. Mohd Nashrul Mohd Zubir and Bijan Shirinzadeh, 2009, “Modeling and design of a high precision microgripper for microhandling operation,” ICIT 2009. IEEE International Conference, pp. 1 - 6 [8]. REMackay, H R Le, S Clark and J A Williams, 2013, “Polymer micro-grippers with an integrated force sensor for biological manipulation,” Journal of micromechanics and microengineering [9]. Keith Houston, Clemens Eder, Arne Sieber, Arianna Menciassi, Maria Chiara Carrozza and Paolo Dario, 2007, “Polymer sensorised microgrippers using SMA actuation,” 2007 IEEE International Conference on Robotics and Automation Roma, Italy, pp. 820 – 825 [10]. Su, H.J. and McCarthy, J.M., 2005, “Synthesis of Compliant Mechanisms with Specified Equilibrium Positions,” Proceedings of 2005 ASME Design Engineering Technical Conferences, September 24–28, 2005, Long Beach, California, USA, pp. 61-69 (paper no. DETC2005-85085). [11]. Qiu, J., Lang, J.H., and Slocum, A.H., 2005, “A Bulk-Micromachined Bistable Relay with U-Shaped Thermal Actuators,” Journal of Microelectromechanical Systems, Vol. 14, pp. 1099-1109. [12]. Gomm, T., Howell, L.L., and Selfridge, R.H., 2005, “In-Plane Linear Displacement Bistable Microrelay,” Journal of Micromechanics and Microenginering, Vol. 12, pp. 257-264. [13]. Jensen, B.D., 1998, “Identification of Macro- and Micro- Compliant Mechanism Configurations Resulting in Bistable Behavior,” M.S. Thesis, Brigham Young University, Provo, Utah [14]. Tsay, J., Su, L.Q., and Sung, C.K., 2005, “Design of a Linear Micro-Feeding System Featuring Bistable Mechanisms,” Journal of Micromechanics and Microengineering, Vol. 15, pp. 63-70.4 [15]. Ko, J.S., Lee, M.G., Han, J.S., Go, J.S., Shin, B., and Lee, D.S., 2006, “A Laterally-Driven Bistable Electromagnetic Microrelay,” ETRI Journal, Vol. 28, pp. 389-392. [16]. Wang, D.A., Pham, H.T., and Hsieh, Y.H., 2009, “Dynamical Switching of an Electromagnetically Driven Compliant Bistable Mechanism,” Sensors and Actuators A, Vol. 149, pp. 143-151. [17]. Freudenreich, M., Mescheder, U., and Somogyi, G.., 2003, “Design Considerations and Realization of a Novel Micromechanical Bi-Stable Switch,” Transducers 2003 Workshop, pp. 1096-1099. [18]. Wagner, B., Quenzer, H.J., Hoerschelmann, S., Lisec, T., and Juerss, M., 1996, “Bistable Microvalve with Pneumatically Coupled Membranes,” Proceedings of IEEE MEMS 1996 Conference, pp. 384-388. [19]. Hansen, B.J., Carron, C.J., Jensen, B.D., Hawkins, A.R., and Schultz, S.M., 2007, “Plastic Latching Accelerometer Based on Bistable Compliant Mechanisms,” Smart Material and Structures, Vol. 16, pp. 1967-1972. [20]. Casals-Terre, J. and Shkel, A., 2005, “Snap-Action Bistable Micromechanism Actuated by Nonlinear Resonance,” Proceedings of IEEE Sensors 2005, pp. 893-896. [21] Wang, D.A, Chiu, Y.S., 2010, “Design, fabrication and characterization of a magnetically actuated Co-Ni bistable micromechanism,” Graduate Institute of Precision Engineering of NCHU, pp. 1-77

A new microgripper integrated with a bistable mechanism is presented to provide a way for motion control of microgripper, where gripping and release are achieved when the bistable mechanism moves forward and backward, respectively. The design parameters are displacement, bistability, and the actuated force. With current applied to the microgripper, the relationship between displacement and the reaction force of the compliant bistable mechanism are investigated.
UV-LIGA process are used for the fabrication of the prototype, We use photolithography and electrodeposition to fabricate Ni microgripper on glass substrates. On the fabrication aspect, taking advantage of good adhesion and selectively etching properties between Ni, Cu and Ti, using Cu as the sacrificial layer to fabricate the Ni microgripper.
In the experimental setup is using of the DC power supply and the permanent magnet to provide electromagnetic force driving the microgripper. With the embedded bistable mechanism, the microgripper actively releases the microobject and requires no power input during holding of microobjects to reduce energy consumption.
其他識別: U0005-1908201311390900
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