Please use this identifier to cite or link to this item: http://hdl.handle.net/11455/43318
DC FieldValueLanguage
dc.contributor.authorChang, Y.Y.en_US
dc.contributor.author吳威德zh_TW
dc.contributor.authorChang, C.P.en_US
dc.contributor.authorWang, D.Y.en_US
dc.contributor.authorYang, S.M.en_US
dc.contributor.authorWu, W.T.en_US
dc.date2008zh_TW
dc.date.accessioned2014-06-06T08:10:35Z-
dc.date.available2014-06-06T08:10:35Z-
dc.identifier.issn0925-8388zh_TW
dc.identifier.urihttp://hdl.handle.net/11455/43318-
dc.description.abstractThe high-temperature oxidation behavior of the CrN and Cr-Al-Si-N coatings was studied. These coatings were deposited on silicon substrates by using a cathodic-arc deposition system with lateral rotating arc cathodes. Chromium and Al88Si12 cathodes were used for the deposition of Cr-Al-Si-N coatings. The deposited Cr0.38Al0.56Si0.06N exhibited higher hardness of 41 +/- 2 GPa and higher H-3/E*(2) ratio of 0.468 GPa than CrN due to the introduction of Al and Si to form a nanocrystalline structure. For the high-temperature oxidation test, the coated samples were annealed at 800 degrees C in air for 2 h. The Cr0.38Al0.56Si0.06N possessed much lower oxidation rate as measured by the oxide layer of the coatings. The addition of Al and Si in the coating may inhibit the formation of Cr2N phase and grain coarsening as found in the deposited CrN coating. In addition, the coexisting Al2O3 and SiO2 near the surface retarded the diffusion of oxygen into the Cr0.38Al0.56Si0.06N. The deposited Cr0.38Al0.56Si0.06N showed an oxidation behavior superior to the CrN. The high-temperature oxidation resistance of the CrN coatings can be improved by the formation of nanocomposite Cr-Al-Si-N. (C) 2007 Elsevier B.V. All rights reserved.en_US
dc.language.isoen_USzh_TW
dc.relationJournal of Alloys and Compoundsen_US
dc.relation.ispartofseriesJournal of Alloys and Compounds, Volume 461, Issue 1-2, Page(s) 336-341.en_US
dc.relation.urihttp://dx.doi.org/10.1016/j.jallcom.2007.06.084en_US
dc.subjectcathodic-arc evaporationen_US
dc.subjectoxidationen_US
dc.subjecthard coatingen_US
dc.subjectthin-filmsen_US
dc.subjectnanocomposite coatingsen_US
dc.subjectmechanical-propertiesen_US
dc.subjectmultilayeren_US
dc.subjectcoatingsen_US
dc.subjectbehavioren_US
dc.subjecttinen_US
dc.subjectmicrostructureen_US
dc.subjectcrnen_US
dc.subjecthardnessen_US
dc.subjectnitrideen_US
dc.titleHigh temperature oxidation resistance of CrAlSiN coatings synthesized by a cathodic arc deposition processen_US
dc.typeJournal Articlezh_TW
dc.identifier.doi10.1016/j.jallcom.2007.06.084zh_TW
item.languageiso639-1en_US-
item.openairecristypehttp://purl.org/coar/resource_type/c_18cf-
item.cerifentitytypePublications-
item.openairetypeJournal Article-
item.fulltextno fulltext-
item.grantfulltextnone-
Appears in Collections:材料科學與工程學系
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