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標題: Barium titanate films synthesized by an anodic oxidation-based electrochemical method
作者: Lu, F.H.
Wu, C.T.
Hung, C.Y.
關鍵字: barium titanate;anodising;X-ray diffraction;SEM;anodic spark;deposition;batio3 thin-film;hydrothermal synthesis;electrical-properties;dielectric-properties;growth;titanium;electrodes;deposition;silicon
Project: Surface & Coatings Technology
期刊/報告no:: Surface & Coatings Technology, Volume 153, Issue 2-3, Page(s) 276-283.
Barium titanate films were synthesized by anodic oxidation galvanostatically in an electrolyte of 0.5 M Ba(CH(3)COO)(2) with 2 M NaOH. The films were first prepared using a wide constant current rang: from 5 to 40 mA. XRD results showed that ruble TiO(2) = was present at 10 mA and cubic BaTiO(3) films could be obtained at currents over 20 mA. The Ti anodes were then electrolyzed at constant current of 30 mA with various deposition times from 0.5 to 4 h. XRD results showed that TiO(2) existed at 0.5 h and BaTiO(3) appeared at electrolytic times over 0.75 h. From the XRD results associated with the variations of electrolytic voltage with time, ruble TiO(2) has been found to be a precursor for the formation of BaTiO(3). BaTiO(3) films with uniformly distributed small grains were formed at voltages over 60 V and below the dielectric breakdown voltage. The formation mechanism could be due to dissolution and crystallization. BaTiO(3) films with large crater shaped grains were present when voltages reached a dielectric breakdown voltage, which could be due to anodic spark deposition. (C) 2002 Elsevier Science B.V. All lights reserved.
ISSN: 0257-8972
DOI: 10.1016/s0257-8972(01)01674-7
Appears in Collections:材料科學與工程學系

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