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標題: Evaluation of Poisson's ratio and Young's modulus of nitride films by combining grazing incidence X-ray diffraction and laser curvature techniques
作者: Chen, H.Y.
Chen, J.H.
Lu, F.H.
關鍵字: X-ray diffraction;nitrides;TiAlN;elastic properties;Poisson's ratio;Young's modulus;ti1-xalxn thin-films;elastic properties;residual-stress;temperature;ti
Project: Thin Solid Films
期刊/報告no:: Thin Solid Films, Volume 516, Issue 2-4, Page(s) 345-348.
Measurements of Poisson's ratio and the Young's modulus of thin films have been problematic. In this work, evaluation of both Poisson's ratio and Young's modulus is conducted using grazing incidence X-ray diffraction combined with measurement of the induced stress. Poisson's ratio was evaluated from analysis of the X-ray diffraction data to obtain a strain-cos(2)alpha.sin(2)psi, plot. Moreover, the Young's modulus of the films could be also calculated from that plot as well as from the residual stress, which could be determined by a measurement of stress induced substrate curvature. The ternary nitride TiAlN is used as a model system for the evaluation. The films, prepared by cathodic arc plasma deposition, exhibited a strong (111) preferred orientation and a composition corresponding to Ti0.6Al0.4N. The measured Poisson's ratio and the Young's modulus of the films were 0.143 +/- 0.003 and 310 +/- 20 GPa, respectively, which are comparable to those reported in the literature. (C) 2007 Elsevier B.V. All rights reserved.
ISSN: 0040-6090
DOI: 10.1016/j.tsf.2007.06.135
Appears in Collections:材料科學與工程學系

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