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標題: Optical Properties of InGaN-Based Light Emitting Diodes Fabricated Through Dry and Wet Mesa Etching Process
作者: Lin, C.F.
Jiang, R.H.
Yang, C.C.
Lin, C.M.
Liu, H.C.
Huang, K.P.
關鍵字: multiple-quantum wells;piezoelectric field;films;gan
Project: Journal of the Electrochemical Society
期刊/報告no:: Journal of the Electrochemical Society, Volume 156, Issue 12, Page(s) H930-H935.
InGaN-based light emitting diodes (LEDs) were fabricated through a photoelectrochemical (PEC) wet mesa etching process to replace the conventional dry mesa etching process. The undercut structures were formed from a bandgap-selective lateral wet etching process that occurred at the InGaN/GaN multiple-quantum-well layers. By measuring the selective-area microphotoluminescence spectra focused on the mesa edge region, the blueshift wavelength of the photoluminescence spectrum in the wet mesa etched light emitting diode (WME-LED) was 9.1 nm (55 meV) that was compared to the conventional dry etching LED. The relative internal quantum efficiencies of WME-LED were calculated as 13.7% (at the first region), 21.8% (at the second region), and 24.5% (at the third region) from the mesa center to the edge. The flatband voltage of the WME-LED was -13 V to balance the piezoelectric field, calculated as -1.17 MV/cm, in the InGaN active layer. However, we did not observe any flatband voltage in the conventional LED up to -19 V (piezoelectric field larger than -1.9 MV/cm). By forming the bending undercut structure on p-type GaN:Mg layer, the lattice mismatch induces a compressed strain and a piezoelectric field in the InGaN active layer that can be partially released in the WME-LED by using a PEC wet mesa etching process. (C) 2009 The Electrochemical Society. [DOI: 10.1149/1.3236425]
ISSN: 0013-4651
DOI: 10.1149/1.3236425
Appears in Collections:材料科學與工程學系

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