Please use this identifier to cite or link to this item: http://hdl.handle.net/11455/43577
DC FieldValueLanguage
dc.contributor.authorSung, Y.C.en_US
dc.contributor.author張守一zh_TW
dc.contributor.authorLai, C.H.en_US
dc.contributor.authorLin, S.J.en_US
dc.contributor.authorChang, S.Y.en_US
dc.date2006zh_TW
dc.date.accessioned2014-06-06T08:11:10Z-
dc.date.available2014-06-06T08:11:10Z-
dc.identifier.issn1099-0062zh_TW
dc.identifier.urihttp://hdl.handle.net/11455/43577-
dc.description.abstractThe atomic-scale crystallography of early-stage nucleation of sensitization-activated palladium (Pd) catalysts and electrolessly plated copper (Cu) films has been investigated. Small Pd nanocrystallites of 5-10 nm were uniformly distributed as a single layer. Neighboring Pd nanocrystallites exhibited similar crystallography irrelevant to the random orientations of polycrystalline TaN substrate. Subsequently deposited Cu nanocrystallites of only 1 nm with small-angle boundaries nucleated on the Pd nanocrystallites with an orientation relationship of Cu [111] parallel to Pd [111]. In comparison, displacement-activated Pd preferentially nucleated on TaN, and Cu followed the orientation of Pd grains with a relationship of Cu [111] parallel to Pd [200]. (c) 2006 The Electrochemical Society.en_US
dc.language.isoen_USzh_TW
dc.relationElectrochemical and Solid State Lettersen_US
dc.relation.ispartofseriesElectrochemical and Solid State Letters, Volume 9, Issue 5, Page(s) C85-C87.en_US
dc.relation.urihttp://dx.doi.org/10.1149/1.2186027en_US
dc.subjectultralarge-scale integrationen_US
dc.subjectelectrochemical depositionen_US
dc.subjecttitaniumen_US
dc.subjectnitrideen_US
dc.subjectbarrier layersen_US
dc.subjectcu depositionen_US
dc.subjectmetallizationen_US
dc.subjectinterconnectionsen_US
dc.subjectgrowthen_US
dc.titleEarly-stage nucleation crystallography of sensitization-activated palladium catalysts and electrolessly deposited copper filmsen_US
dc.typeJournal Articlezh_TW
dc.identifier.doi10.1149/1.2186027zh_TW
item.grantfulltextnone-
item.openairetypeJournal Article-
item.languageiso639-1en_US-
item.fulltextno fulltext-
item.cerifentitytypePublications-
item.openairecristypehttp://purl.org/coar/resource_type/c_18cf-
Appears in Collections:材料科學與工程學系
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