Preparation and characterization of AlCrTaTiZr multi-element nitride coatings

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Please use this identifier to cite or link to this item: http://hdl.handle.net/11455/43621

標題:	Preparation and characterization of AlCrTaTiZr multi-element nitride coatings
作者:	Lai, C.H. 張守一 Lin, S.J. Yeh, J.W. Chang, S.Y.
關鍵字:	high entropy alloy;multi-element;nitride coatings;magnetron;sputtering;hardness;high-entropy alloys;mechanical-properties;tin films;nanocomposite;coatings;hard coatings;thin-films;deposition;steel;temperature;substrate
Project:	Surface & Coatings Technology
期刊/報告no：:	Surface & Coatings Technology, Volume 201, Issue 6, Page(s) 3275-3280.
摘要:	Multi-element nitride films of AlCrTaTiZr high-entropy alloy have been prepared in this study by reactive radio-frequency magnetron sputtering. The influences of nitrogen flow ratio on the chemical composition, microstructure and mechanical properties of the deposited nitride films have been investigated. The AlCrTaTiZr alloy film exhibited an amorphous structure, while a simple face-center-cubic solid-solution structure was observed in the nitride films prepared under different nitrogen flow ratios. The multi-element AlCrTaTiZr nitride films exhibited much improved mechanical properties as compared with conventional nitride hard coatings of transition metals. (c) 2006 Elsevier B.V. All rights reserved.
URI:	http://hdl.handle.net/11455/43621
ISSN:	0257-8972
DOI:	10.1016/j.surfcoat.2006.06.048
Appears in Collections:	材料科學與工程學系

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