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標題: Fabrication and characterization of InGaN-based green resonant-cavity LEDs using hydrogen ion-implantation techniques
作者: Huang, S.Y.
Horng, R.H.
Kuo, H.C.
Wuu, D.S.
關鍵字: light-emitting-diodes;laser lift-off;extraction;heterostructure;impact;gan
Project: Journal of the Electrochemical Society
期刊/報告no:: Journal of the Electrochemical Society, Volume 154, Issue 11, Page(s) H962-H966.
The InGaN-based green resonant-cavity light-emitting diodes (RCLEDs) have been fabricated using hydrogen ion-implantation and laser liftoff techniques. The RCLEDs structure consisted of an InGaN/GaN multiple-quantum-well active layer between the top (5 pairs) and bottom (7.5 pairs) dielectric TiO2/SiO2 distributed Bragg reflectors with optical reflectance of 85% and 99.9%, respectively. The insulation layers of the RCLEDs with and without H+ implantation were formed by the hydrogen ion-implantation layers of 1x10(14) ions/cm(2) concentration and SiO2 film, respectively. The corresponding forward turn-on voltage at 0.6 kA/cm(2) dc current density injection were about similar to 4.58 V and similar to 4.55 V for the RCLEDs with and without H+ implantation. The light output intensity of the RCLEDs with H+ implantation is higher by a factor of 1.4 as compared to that of the similar structure without H+ implantation at a current density of 0.6 kA/cm(2). The directionality of RCLEDs with H+ implantation is superior to that of RCLEDs without H+ implantation. (c) 2007 The Electrochemical Society.
ISSN: 0013-4651
DOI: 10.1149/1.2778860
Appears in Collections:材料科學與工程學系

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