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標題: Effects of substrate size on properties of carbon coatings on glass cylinder substrates prepared by thermal chemical vapor deposition
作者: Chen, P.Y.
Shiue, S.T.
Lin, H.Y.
關鍵字: Carbon coating;Thermal chemical vapor deposition;Raman spectra;Surface roughness;Optical fiber;coated optical-fibers;induced stress voids;a-c-h;cvd carbon;mechanical strength;films;growth;thickness;plasma;temperature
Project: Thin Solid Films
期刊/報告no:: Thin Solid Films, Volume 518, Issue 10, Page(s) 2883-2889.
The effect of the substrate size on the properties of carbon coatings that are deposited on the glass cylinder substrates by thermal chemical vapor deposition is investigated. Experimental results show that the deposition rate of carbon coatings decreases as the diameter of the glass cylinder increases, because the residence time of the precursor gas in the deposition zone decreases and the deposition area of the substrate increases. Experimental results also reveal that the surface roughness and electrical resistivity of carbon coatings decrease as the diameter of the glass cylinder increases, while the degree of ordering and crystallite size of the carbon coatings increase. (C) 2009 Elsevier B.V. All rights reserved.
ISSN: 0040-6090
DOI: 10.1016/j.tsf.2009.10.042
Appears in Collections:材料科學與工程學系

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