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標題: Efficiency improvement of GaN-based LEDs with ITO texturing window layers using natural lithography
作者: Horng, R.H.
Huang, S.H.
Yang, C.C.
Wuu, D.S.
關鍵字: GaN;indium-tin oxide (ITO);light-emitting diode (LED);natural;lithography;surface texturing;light-emitting-diodes;external quantum efficiency;induced damage;surface
Project: Ieee Journal of Selected Topics in Quantum Electronics
期刊/報告no:: Ieee Journal of Selected Topics in Quantum Electronics, Volume 12, Issue 6, Page(s) 1196-1201.
In conventional GaN light-emitting diodes (LEDs), a significant gap exists between the internal and external efficiencies owing to the narrow escape cone for light in high refractive index semiconductors. In this paper, p-side-up GaN/sapphire LEDs with surface-textured indium-tin-oxide (ITO) window layers were investigated using natural lithography with polystyrene spheres as the etching mask. Under optimum etching conditions, the surface roughness of the ITO film can reach 140 nm, while the polystyrene sphere on the textured ITO surface is maintained at about 250-300 nm in diameter. The LEDs fabricated using the surface-textured ITO provided an output power that exceeded that of the planar-surface LED by about 30% and 40% at 20 and 400 mA current injection, respectively. After calculating, the extraction quantum efficiency of ITO/GaN LEDs with and without textured surface is 22.6% and 17.4%, respectively. There is about 5.3% improvement in the extraction quantum efficiency.
ISSN: 1077-260X
DOI: 10.1109/jstqe.2006.884060
Appears in Collections:材料科學與工程學系

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