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標題: Neural net-based modeling and control of a micropositioning platform using piezoelectric actuators
作者: Liu, V.T.
Huang, H.C.
Lin, C.L.
Jian, Z.J.
關鍵字: hysteresis;piezoelectric actuator;evolutionary algorithms;cross-coupling controller;piezoceramic actuators;hysteresis
Project: Journal of Vibration and Control
期刊/報告no:: Journal of Vibration and Control, Volume 13, Issue 3, Page(s) 309-325.
The paper proposes an integrated controller which combines feedforward, PID and a cross-coupling controller to achieve high accuracy for a dual-axis piezoelectric actuated platform. A Preisach model is created to numerically describe the hysteresis behavior of the piezoelectric actuators. On the basis of the Preisach model, a feedforward compensator is developed to compensate for the hysteresis nonlinearity. A PID controller is introduced to further suppress the tracking error due to the modeling inaccuracy and hence to obtain precision tracking control. Finally, a neural net-based cross-coupling control scheme is proposed to reduce the contour errors, which are very typical in dual-axis tracking control problems. The approach developed is numerically and experimentally verified with a variety of operating conditions.
ISSN: 1077-5463
DOI: 10.1177/1077546307076900
Appears in Collections:電機工程學系所

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