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|標題:||Measurement and tracking control of the Z-tilts error compensating stage of the nano-measuring machine||作者:||Liu, V.T.
|關鍵字:||Cybernetics;Tracking;Control systems;Piezoelectricity;Actuators;hysteresis||Project:||Kybernetes||期刊/報告no：:||Kybernetes, Volume 39, Issue 6, Page(s) 1029-1039.||摘要:||
Purpose - The purpose of this paper is to develop the multi-degree-of-freedom measurement system to test, verify, and control the nano-measuring machine. Design/methodology/approach - A generic differential model approach is constructed to numerically describe the hysteresis effects of piezoelectric actuators. Based on the generic differential model, a feedforward compensator with a proportional integral (PI) type controller is designed to compensate for the hysteresis nonlinearity of a piezoelectric actuated three degree-of-freedom coplanar nanostage which can provide high-precision applications. Findings - The Z-tilts (z, pitch, and roll motion) error compensation stage of the nano-measuring machine is accomplished. Moreover, a high-resolution laser interferometer is used to measure position accurately. Originality/value - This paper contributes to develop a tracking control design method for the piezoelectric motion platform which combines a closed-loop feedforward compensator with a PI type controller.
|Appears in Collections:||電機工程學系所|
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