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標題: Measurement and tracking control of the Z-tilts error compensating stage of the nano-measuring machine
作者: Liu, V.T.
Liu, C.H.
Li, H.W.
Chen, C.L.
Lin, C.L.
Lin, Y.C.
關鍵字: Cybernetics;Tracking;Control systems;Piezoelectricity;Actuators;hysteresis
Project: Kybernetes
期刊/報告no:: Kybernetes, Volume 39, Issue 6, Page(s) 1029-1039.
Purpose - The purpose of this paper is to develop the multi-degree-of-freedom measurement system to test, verify, and control the nano-measuring machine. Design/methodology/approach - A generic differential model approach is constructed to numerically describe the hysteresis effects of piezoelectric actuators. Based on the generic differential model, a feedforward compensator with a proportional integral (PI) type controller is designed to compensate for the hysteresis nonlinearity of a piezoelectric actuated three degree-of-freedom coplanar nanostage which can provide high-precision applications. Findings - The Z-tilts (z, pitch, and roll motion) error compensation stage of the nano-measuring machine is accomplished. Moreover, a high-resolution laser interferometer is used to measure position accurately. Originality/value - This paper contributes to develop a tracking control design method for the piezoelectric motion platform which combines a closed-loop feedforward compensator with a PI type controller.
ISSN: 0368-492X
DOI: 10.1108/03684921011046807
Appears in Collections:電機工程學系所

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