Please use this identifier to cite or link to this item: http://hdl.handle.net/11455/44179
DC FieldValueLanguage
dc.contributor.authorLiu, V.T.en_US
dc.contributor.author林俊良zh_TW
dc.contributor.authorLiu, C.H.en_US
dc.contributor.authorLi, H.W.en_US
dc.contributor.authorChen, C.L.en_US
dc.contributor.authorLin, C.L.en_US
dc.contributor.authorLin, Y.C.en_US
dc.date2010zh_TW
dc.date.accessioned2014-06-06T08:11:59Z-
dc.date.available2014-06-06T08:11:59Z-
dc.identifier.issn0368-492Xzh_TW
dc.identifier.urihttp://hdl.handle.net/11455/44179-
dc.description.abstractPurpose - The purpose of this paper is to develop the multi-degree-of-freedom measurement system to test, verify, and control the nano-measuring machine. Design/methodology/approach - A generic differential model approach is constructed to numerically describe the hysteresis effects of piezoelectric actuators. Based on the generic differential model, a feedforward compensator with a proportional integral (PI) type controller is designed to compensate for the hysteresis nonlinearity of a piezoelectric actuated three degree-of-freedom coplanar nanostage which can provide high-precision applications. Findings - The Z-tilts (z, pitch, and roll motion) error compensation stage of the nano-measuring machine is accomplished. Moreover, a high-resolution laser interferometer is used to measure position accurately. Originality/value - This paper contributes to develop a tracking control design method for the piezoelectric motion platform which combines a closed-loop feedforward compensator with a PI type controller.en_US
dc.language.isoen_USzh_TW
dc.relationKybernetesen_US
dc.relation.ispartofseriesKybernetes, Volume 39, Issue 6, Page(s) 1029-1039.en_US
dc.relation.urihttp://dx.doi.org/10.1108/03684921011046807en_US
dc.subjectCyberneticsen_US
dc.subjectTrackingen_US
dc.subjectControl systemsen_US
dc.subjectPiezoelectricityen_US
dc.subjectActuatorsen_US
dc.subjecthysteresisen_US
dc.titleMeasurement and tracking control of the Z-tilts error compensating stage of the nano-measuring machineen_US
dc.typeJournal Articlezh_TW
dc.identifier.doi10.1108/03684921011046807zh_TW
item.openairetypeJournal Article-
item.openairecristypehttp://purl.org/coar/resource_type/c_18cf-
item.grantfulltextnone-
item.fulltextno fulltext-
item.cerifentitytypePublications-
item.languageiso639-1en_US-
Appears in Collections:電機工程學系所
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