Please use this identifier to cite or link to this item: http://hdl.handle.net/11455/44224
標題: (Thin Solid Films,516(2-4):345-348)Evaluation of Poisson's ratio and Young's modulus of nitride films by combining X-ray diffraction and laser curvature techniques
作者: H.Y.Chen
J.H.Chen
F.H.Lu
關鍵字: X-ray diffraction;Nitrides;TiAlN;Elastic properties;Poisson's ratio;Young's modulus
出版社: Netherlands:Elsevier
Project: Thin Solid Films, Volume 516, Issue 2-4, Page(s) 345-348.
URI: http://hdl.handle.net/11455/44224
Appears in Collections:材料科學與工程學系

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