Please use this identifier to cite or link to this item: http://hdl.handle.net/11455/44241
標題: (Surf.Coat.Technol.,200(10): 3336-3340)Microstructure evolution of ZrN films annealed in vacuum
作者: Y.C.Chieh
W.Z.Lo
F.H.Lu
關鍵字: ZrN films;Annealing;Microstructure;Stress;Young's Modulus
出版社: Netherlands:Elsevier
Project: Surf.Coat.Technol.,200(10): 3336-3340
URI: http://hdl.handle.net/11455/44241
Appears in Collections:材料科學與工程學系

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