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標題: (Thin Solid Films,517(17):5006-5009)X-ray photoelectron spectroscopy analyses of titanium oxynitride films prepared by magnetron sputtering using air/Ar mixtures
作者: M.H.Chan
關鍵字: Titanium oxynitride films;Air;Sputtering;X-ray photoelectron spectroscopy (XPS)
出版社: Netherlands:Elsevier
Project: Thin Solid Films, Volume 517, Issue 17, Page(s) 5006-5009.
Appears in Collections:材料科學與工程學系

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