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http://hdl.handle.net/11455/44276
標題: | (Thin Solid Films,517(17):5006-5009)X-ray photoelectron spectroscopy analyses of titanium oxynitride films prepared by magnetron sputtering using air/Ar mixtures | 作者: | M.H.Chan F.H.Lu |
關鍵字: | Titanium oxynitride films;Air;Sputtering;X-ray photoelectron spectroscopy (XPS) | 出版社: | Netherlands:Elsevier | Project: | Thin Solid Films, Volume 517, Issue 17, Page(s) 5006-5009. | URI: | http://hdl.handle.net/11455/44276 |
Appears in Collections: | 材料科學與工程學系 |
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