Please use this identifier to cite or link to this item: http://hdl.handle.net/11455/44361
標題: (Surf.Coat.Technol.,203:614-618)Preparation of titanium oxynitride thin films by reactive sputtering using air/Ar mixtures
作者: M.H.Chan
F.H.Lu
關鍵字: Titanium oxynitride;Air;Magnetron sputtering;High base pressure
出版社: Netherlands:Elsevier
Project: Surf.Coat.Technol.,203:614-618
URI: http://hdl.handle.net/11455/44361
Appears in Collections:材料科學與工程學系

Show full item record
 

Google ScholarTM

Check


Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.