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http://hdl.handle.net/11455/44361
標題: | (Surf.Coat.Technol.,203:614-618)Preparation of titanium oxynitride thin films by reactive sputtering using air/Ar mixtures | 作者: | M.H.Chan F.H.Lu |
關鍵字: | Titanium oxynitride;Air;Magnetron sputtering;High base pressure | 出版社: | Netherlands:Elsevier | Project: | Surf.Coat.Technol.,203:614-618 | URI: | http://hdl.handle.net/11455/44361 |
Appears in Collections: | 材料科學與工程學系 |
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