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標題: A Zinc Oxide Nanorod Ammonia Microsensor Integrated with a Readout Circuit on-a-Chip
作者: Yang, Ming-Zhi
Dai, Ching-Liang
Wu, Chyan-Chyi
關鍵字: ammonia microsensor;zinc oxide film;nanorod;readout circuit
出版社: MDPI, Basel
Project: Sensors, Volume 11, Issue 12, Page(s) 11112-11121.
A zinc oxide nanorod ammonia microsensor integrated with a readout circuit on-a-chip fabricated using the commercial 0.35 m complementary metal oxide semiconductor (CMOS) process was investigated. The structure of the ammonia sensor is composed of a sensitive film and polysilicon electrodes. The ammonia sensor requires a post-process to etch the sacrificial layer, and to coat the sensitive film on the polysilicon electrodes. The sensitive film that is prepared by a hydrothermal method is made of zinc oxide. The sensor resistance changes when the sensitive film adsorbs or desorbs ammonia gas. The readout circuit is used to convert the sensor resistance into the voltage output. Experiments show that the ammonia sensor has a sensitivity of about 1.5 mV/ppm at room temperature.
ISSN: 1424-8220
DOI: 10.3390/s111211112
Appears in Collections:機械工程學系所

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