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標題: Fabrication and Characterization of Polyaniline/PVA Humidity Microsensors
作者: Yang, Ming-Zhi
Dai, Ching-Liang
Lin, Wei-Yi
關鍵字: humidity microsensors;polyaniline;polyvinyl alcohol;MEMS
出版社: MDPI, Basel
Project: Sensors, Volume 11, Issue 8, Page(s) 8143-8151.
This study presents the fabrication and characterization of a humidity microsensor that consists of interdigitated electrodes and a sensitive film. The area of the humidity microsensor is about 2 mm2. The sensitive film is polyaniline doping polyvinyl alcohol (PVA) that is prepared by the sol-gel method, and the film has nanofiber and porous structures that help increase the sensing reaction. The commercial 0.35 m Complimentary Metal Oxide Semiconductor (CMOS) process is used to fabricate the humidity microsensor. The sensor needs a post-CMOS process to etch the sacrificial layer and to coat the sensitive film on the interdigitated electrodes. The sensor produces a change in resistance as the polyaniline/PVA film absorbs or desorbs vapor. Experimental results show that the sensitivity of the humidity sensor is about 12.6 k/%RH at 25 °C.
ISSN: 1424-8220
DOI: 10.3390/s110808143
Appears in Collections:機械工程學系所

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