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|標題:||Realization of free-space optical pickup head with stacked Si-based phase elements||作者:||Chang, J.Y.
|關鍵字:||diffractive optical elements;microoptoelectrome-chanical systems;(MOEMS);pickup module;SiNx membrane;disk pickup||Project:||Ieee Photonics Technology Letters||期刊/報告no：:||Ieee Photonics Technology Letters, Volume 17, Issue 1, Page(s) 214-216.||摘要:||
We have developed a novel stacked silicon-based microoptical system, which is optical-on-axis and transmissible in both visible and infrared ranges. By using the new microoptical system techniques, we fabricated a miniaturized optical pickup head module. This optical pickup head consisted of a 650-nm laser diode, a 45degrees silicon reflector, a grating, a holographic optical element, and some aspherical Fresnel lenses. These optical phase elements fabricated on a SiNx membrane were suspended on Si chips. Each element was then stacked by chip bonding. We could obtain a circular focusing spot on the optical disc as small as 3.1 mum.
|Appears in Collections:||機械工程學系所|
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