Please use this identifier to cite or link to this item: http://hdl.handle.net/11455/44826
標題: Realization of free-space optical pickup head with stacked Si-based phase elements
作者: Chang, J.Y.
施錫富
Wang, C.M.
Lee, C.C.
Shih, H.F.
Wu, M.L.
關鍵字: diffractive optical elements;microoptoelectrome-chanical systems;(MOEMS);pickup module;SiNx membrane;disk pickup
Project: Ieee Photonics Technology Letters
期刊/報告no:: Ieee Photonics Technology Letters, Volume 17, Issue 1, Page(s) 214-216.
摘要: 
We have developed a novel stacked silicon-based microoptical system, which is optical-on-axis and transmissible in both visible and infrared ranges. By using the new microoptical system techniques, we fabricated a miniaturized optical pickup head module. This optical pickup head consisted of a 650-nm laser diode, a 45degrees silicon reflector, a grating, a holographic optical element, and some aspherical Fresnel lenses. These optical phase elements fabricated on a SiNx membrane were suspended on Si chips. Each element was then stacked by chip bonding. We could obtain a circular focusing spot on the optical disc as small as 3.1 mum.
URI: http://hdl.handle.net/11455/44826
ISSN: 1041-1135
DOI: 10.1109/lpt.2004.836896
Appears in Collections:機械工程學系所

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