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標題: Cobalt Oxide Nanosheet and CNT Micro Carbon Monoxide Sensor Integrated with Readout Circuit on Chip
作者: Dai, C.L.
Chen, Y.C.
Wu, C.C.
Kuo, C.F.
關鍵字: micro carbon monoxide sensor;cobalt oxide film;readout circuit;gas-sensing properties;cmos-mems technique;low-temperatures;co;fabrication;films;manufacture;heater;coooh;au
Project: Sensors
期刊/報告no:: Sensors, Volume 10, Issue 3, Page(s) 1753-1764.
The study presents a micro carbon monoxide (CO) sensor integrated with a readout circuit-on-a-chip manufactured by the commercial 0.35 mu m complementary metal oxide semiconductor (CMOS) process and a post-process. The sensing film of the sensor is a composite cobalt oxide nanosheet and carbon nanotube (CoOOH/CNT) film that is prepared by a precipitation-oxidation method. The structure of the CO sensor is composed of a polysilicon resistor and a sensing film. The sensor, which is of a resistive type, changes its resistance when the sensing film adsorbs or desorbs CO gas. The readout circuit is used to convert the sensor resistance into the voltage output. The post-processing of the sensor includes etching the sacrificial layers and coating the sensing film. The advantages of the sensor include room temperature operation, short response/recovery times and easy post-processing. Experimental results show that the sensitivity of the CO sensor is about 0.19 mV/ppm, and the response and recovery times are 23 s and 34 s for 200 ppm CO, respectively.
ISSN: 1424-8220
DOI: 10.3390/s100301753
Appears in Collections:機械工程學系所

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