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標題: Manufacture of a Polyaniline Nanofiber Ammonia Sensor Integrated with a Readout Circuit Using the CMOS-MEMS Technique
作者: Liu, M.C.
Dai, C.L.
Chan, C.H.
Wu, C.C.
關鍵字: Ammonia sensor;CMOS;Polyaniline;readout circuit;gas-sensor;fabrication;inductors;array
Project: Sensors
期刊/報告no:: Sensors, Volume 9, Issue 2, Page(s) 869-880.
This study presents the fabrication of a polyaniline nanofiber ammonia sensor integrated with a readout circuit on a chip using the commercial 0.35 mu m complementary metal oxide semiconductor (CMOS) process and a post-process. The micro ammonia sensor consists of a sensing resistor and an ammonia sensing film. Polyaniline prepared by a chemical polymerization method was adopted as the ammonia sensing film. The fabrication of the ammonia sensor needs a post-process to etch the sacrificial layers and to expose the sensing resistor, and then the ammonia sensing film is coated on the sensing resistor. The ammonia sensor, which is of resistive type, changes its resistance when the sensing film adsorbs or desorbs ammonia gas. A readout circuit is employed to convert the resistance of the ammonia sensor into the voltage output. Experimental results show that the sensitivity of the ammonia sensor is about 0.88 mV/ppm at room temperature.
ISSN: 1424-8220
DOI: 10.3390/s90200869
Appears in Collections:機械工程學系所

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