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標題: A circular microchannel integrated with embedded sprial electrodes used for fluid transportation
作者: Yang, L.J.
Wang, J.M.
Ko, K.C.
Shih, W.P.
Dai, C.L.
關鍵字: circular microchannel;spiral electrodes;rolling exposure;electrohydrodynamic (EHD)
Project: Sensors and Actuators a-Physical
期刊/報告no:: Sensors and Actuators a-Physical, Volume 139, Issue 1-2, Page(s) 172-177.
This paper proposes a novel method to fabricate a circular microchannel with embedded spiral electrodes used for fluid transportation by inserting glass capillary as sacrificial mould. Utilizing a rolling exposure technique in the photolithography process, the continuous spiral electrode has been formed on the non-planar surface of a glass capillary successfully. Moreover, using the concept of sacrificial layer, the spiral electrodes are transferred on the inner surface of a SU-8 circular microchannel with a diameter of 350 mu m. The fabricated device was regarded as an electrohydrodynamic (EHD) micropump, and has a pumping capacity of 4.5 mu l/min herein. (c) 2006 Published by Elsevier B.V.
ISSN: 0924-4247
DOI: 10.1016/j.sna.2006.10.039
Appears in Collections:機械工程學系所

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