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|標題:||A circular microchannel integrated with embedded sprial electrodes used for fluid transportation||作者:||Yang, L.J.
|關鍵字:||circular microchannel;spiral electrodes;rolling exposure;electrohydrodynamic (EHD)||Project:||Sensors and Actuators a-Physical||期刊/報告no：:||Sensors and Actuators a-Physical, Volume 139, Issue 1-2, Page(s) 172-177.||摘要:||
This paper proposes a novel method to fabricate a circular microchannel with embedded spiral electrodes used for fluid transportation by inserting glass capillary as sacrificial mould. Utilizing a rolling exposure technique in the photolithography process, the continuous spiral electrode has been formed on the non-planar surface of a glass capillary successfully. Moreover, using the concept of sacrificial layer, the spiral electrodes are transferred on the inner surface of a SU-8 circular microchannel with a diameter of 350 mu m. The fabricated device was regarded as an electrohydrodynamic (EHD) micropump, and has a pumping capacity of 4.5 mu l/min herein. (c) 2006 Published by Elsevier B.V.
|Appears in Collections:||機械工程學系所|
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