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|標題:||Numerical modeling of particle dynamics in a cylindrical chamber containing a rotating disk||作者:||Chein, R.Y.
|關鍵字:||chemical-vapor-deposition;thermophoresis;transport;reactors;surfaces;flows;wafer||Project:||Aerosol Science and Technology||期刊/報告no：:||Aerosol Science and Technology, Volume 38, Issue 3, Page(s) 185-193.||摘要:||
Numerical modeling was performed to study the submicron particle dynamics in a confined flow field containing a rotating disk, temperature gradient, and various inlet gas flow rates. The Lagrangian model was employed to compute particle trajectories under the temperature gradient, disk rotation speed, and inlet gas flow rate effects. The trajectories of particles with diameters of 1 mum, 0.1 mum, and 0.01 mum were examined in this study. When the inlet gas temperature was lower than that of the disk, particle-free zones were created due to upward thermophoretic force for 1 mum and 0.1 mum particles. Disk rotation was found to depress the size of the particle-free zone. Particle deposition onto the disk for 0.01 mum particles was possible because of the Brownian motion effect. A detailed evaluation of the particle-free zone size as a function of the temperature gradient, disk rotation speed, and inlet gas flow rate was performed. When the inlet gas temperature was higher than the disk temperature, particle deposition onto the disk was enhanced due to the downward thermophoretic force for 1 mum and 0.1 mum particles. Disk rotation was found to increase the deposition rate. For 0.01 mum particles, Brownian motion was more important than thermophoretic force in controlling particle behavior. The particle deposition rates as a function of the temperature gradient, disk rotation speed, and inlet gas flow rate were performed.
|Appears in Collections:||機械工程學系所|
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