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標題: Modeling of particle removal using non-contact brush scrubbing in post-CMP cleaning processes
作者: Chein, R.
Liao, W.Y.
關鍵字: electrical double layer force;particle rolling;post-CMP cleaning;thermophoretic force;thin-film fluid flow;mechanisms;surfaces;thermophoresis;adhesion;contact;flow
Project: Journal of Adhesion
期刊/報告no:: Journal of Adhesion, Volume 82, Issue 6, Page(s) 555-575.
Particle removal using non-contact brush scrubbing for post-CMP (Chemical Mechanical Planarization) cleaning is investigated analytically. The removal of SiO2 and Al2O3 particles adhered onto SiO2 film coated on the wafer surface are considered. The cleaning fluid (H2O/NH4OH = 1:25 and 1:200) flowing between the brush and wafer urface is treated as a thin-film fluid flow. The flow field details and its effect on the drag force acting on the adhered particles are discussed. In addition to the drag force, the electrical double layer (EDL) and thermophoretic force effects on particle removal are also considered. It was found that the dominant force in achieving particle removal using a rolling mechanism is the drag force. The EDL and thermophoretic forces have an insignificant effect on particle removal. Based on the results from this study, particles of submicron size can be removed from a wafer surface using higher brush rotation speed and pure deionized (DI) water as the cleaning fluid.
ISSN: 0021-8464
DOI: 10.1080/00218460600766566
Appears in Collections:機械工程學系所

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