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標題: Fabrication of a glucose sensor with oscillator circuit using CMOS-MEMS technique
作者: Yang, Ming-Zhi
Dai, Ching-Liang
Hung, Cheng-Bei
關鍵字: Glucose biosensor;Oscillator circuit;11-mercaptoundecanoic acid;Glucose oxidase
Project: Microelectronic Engineering, Volume 97, page(s) 353–356.
This study investigates the fabrication of a glucose sensor integrated with an oscillator circuit on-a-chip
using the CMOS (complementary metal oxide semiconductor)-MEMS (microelectromechanical system)
technique. The glucose sensor contains interdigitated electrodes, sensitive films and a gold layer. The gold
layer is deposited on the gaps between interdigitated electrodes, and the sensitive films are 11-MUA (11-
mercaptoundecanoic acid) and GOD (glucose oxidase) that are immobilized on the surface of gold layer.
The sensor needs a post-process to coat the sensitive films, and the post-process includes a dry etching to
etch the sacrificial oxide layer and a self-assembled monolayer (SAM) technique to assemble the sensitive
films. The glucose sensor is a capacitive type. The sensor produces a change in capacitance as the sensitive
films absorb glucose. The oscillator circuit is used to convert the capacitance variation of the sensor into
the frequency output. Experiments show that the glucose sensor has a sensitivity of 1.48 MHz/mM.
DOI: 10.1016/j.mee.2012.05.050
Appears in Collections:機械工程學系所

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